Design and fabrication of curved micromirrors using the multipoly process

Mi, Bin; Kahn, H.; Merat, F.L.; Heuer, A. H.; Smith, David A.; Phillips, Steven

doi:10.1109/icsens.2003.1278892

Proceedings of IEEE Sensors 2003 (IEEE Cat. No.03CH37498)

DOI: 10.1109/icsens.2003.1278892

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Design and fabrication of curved micromirrors using the multipoly process

Bin Mi

H. Kahn

F.L. Merat

et al.

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Design and fabrication of curved micromirrors using the multipoly process

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References 11 publications

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