Design and Fabrication of Complementary Metal–Oxide–Semiconductor Sensor Chip for Electrochemical Measurement

Yamazaki, Tomoyuki; Ikeda, Takaaki; Kano, Yoshiko; Takao, Hidekuni; Ishida, M.; Sawada, Kazuaki

doi:10.1143/jjap.49.04dl11

Cited by 9 publications

(6 citation statements)

References 31 publications

(45 reference statements)

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“…The proposed device is then suitable for implantable and portable applications. In addition to the described methods, there is a number of other proposed architectures summarized in Table 1 [ 55 – 58 ].…”

Section: Toward Fully Integrated Cmos Based Biosensorsmentioning

confidence: 99%

Wireless Integrated Biosensors for Point-of-Care Diagnostic Applications

Ghafar-Zadeh

2015

Sensors

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Recent advances in integrated biosensors, wireless communication and power harvesting techniques are enticing researchers into spawning a new breed of point-of-care (POC) diagnostic devices that have attracted significant interest from industry. Among these, it is the ones equipped with wireless capabilities that drew our attention in this review paper. Indeed, wireless POC devices offer a great advantage, that of the possibility of exerting continuous monitoring of biologically relevant parameters, metabolites and other bio-molecules, relevant to the management of various morbid diseases such as diabetes, brain cancer, ischemia, and Alzheimer’s. In this review paper, we examine three major categories of miniaturized integrated devices, namely; the implantable Wireless Bio-Sensors (WBSs), the wearable WBSs and the handheld WBSs. In practice, despite the aforesaid progress made in developing wireless platforms, early detection of health imbalances remains a grand challenge from both the technological and the medical points of view. This paper addresses such challenges and reports the state-of-the-art in this interdisciplinary field.

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Section: Toward Fully Integrated Cmos Based Biosensorsmentioning

confidence: 99%

Wireless Integrated Biosensors for Point-of-Care Diagnostic Applications

Ghafar-Zadeh

2015

Sensors

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“…The RE and the voltage input circuit were incorporated, which were provided externally in our previous study. 23) The external DC source (Hioki E.E. 7011) and oscilloscope (Agilent MSO6014A) were still used, and will be implemented in the miniaturized system in a future design.…”

Section: Measurement Setupmentioning

confidence: 99%

“…The two-stage OPAMP has a design similar to that in a previous report, 23) which was used as a current-to-voltage converter because it has a comparatively higher open loop gain and driving ability. OPAMP1 in Fig.…”

Section: Opamp Characteristicsmentioning

confidence: 99%

Compact Electrochemical System Using On-Chip Sensor Electrodes and Integrated Devices

Yamazaki

Ikeda

Ishida

et al. 2011

Jpn. J. Appl. Phys.

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We report a compact electrochemical sensing system to implement cyclic voltammetry. This type of sensor needs a working electrode, counter electrode, and reference electrode, all of which were integrated on a single chip. The electrochemical system also needs a potentiostat and an input voltage-generating circuit, which were developed using on-chip active devices and a few discrete passive components. This is the first sensor system incorporating electrode-side input voltage generation for electrochemical measurements using an on-chip operational amplifier, which replaces a bulky external voltage controller. A continuous cyclic voltammetry measurement was conducted with a well-studied ferricyanide solution to demonstrate the operation of the intelligent sensor chip. A clear peak was observed and linearity to the target chemical concentration was obtained between the peak height and concentration of the ferricyanide solution. With potential for mass production and small size, this sensor chip could be the best candidate to realize point-of-care testing. This sensor chip is a milestone of a fully integrated electrochemical sensor chip.

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“…MOS gas sensors are highly attractive with high sensitivity, long life, and low cost. However, these gas sensors can only operate at high temperatures (around 400 • C), which is energy consuming and dangerous [3][4][5][6][7][8]. For CO gas detection, the traditional metal oxides are SnO 2 , NiO, ZnO, and so on [9].…”

Section: Introductionmentioning

confidence: 99%

Aging Behavior and Heat Treatment for Room-Temperature CO-Sensitive Pd-SnO2 Composite Nanoceramics

Gui

Huang

et al. 2022

Materials

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A high long-term stability is crucial for room-temperature gas-sensitive metal oxide semiconductors (MOSs) to find practical applications. A series of Pd-SnO2 mixtures with 2, 5, and 10 wt% Pd separately were prepared from SnO2 and Pd powders. Through pressing and sintering, Pd-SnO2 composite nanoceramics have been successfully prepared from the mixtures, which show responses of 50, 100, and 60 to 0.04% CO-20% O2-N2 at room temperature for samples of 2, 5, and 10 wt% Pd, respectively. The room-temperature CO-sensing characteristics were degraded obviously after dozens of days’ aging for all samples. For samples of 5 wt% Pd, the response to CO was decreased by a factor of 4 after 20 days of aging. Fortunately, some rather mild heat treatments will quite effectively reactivate those aged samples. Heat treatment at 150 °C for 15 min in air tripled the response to CO for a 20 days-aged sample of 5 wt% Pd. It is proposed that the deposition of impurity gases in air on Pd in Pd-SnO2 composite nanoceramics has resulted in the observed aging, while their desorption from Pd through mild heat treatments leads to the reactivation. More studies on aging and reactivation of room-temperature gas sensitive MOSs should be conducted to achieve high long-term stability for room-temperature MOS gas sensors.

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Design and Fabrication of Complementary Metal–Oxide–Semiconductor Sensor Chip for Electrochemical Measurement

Cited by 9 publications

References 31 publications

Wireless Integrated Biosensors for Point-of-Care Diagnostic Applications

Wireless Integrated Biosensors for Point-of-Care Diagnostic Applications

Compact Electrochemical System Using On-Chip Sensor Electrodes and Integrated Devices

Aging Behavior and Heat Treatment for Room-Temperature CO-Sensitive Pd-SnO2 Composite Nanoceramics

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