Design and fabrication of an innovative three-axis Hall sensor

Wouters, C.; Vranković, V.; Rössler, C.; Сидоров, С. К.; Ensslin, Klaus; Wegscheider, Werner; Hierold, Christofer

doi:10.1016/j.sna.2015.11.022

Cited by 42 publications

(17 citation statements)

References 16 publications

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“…4). Plugging the values of amplification coefficient Cxy = 2.335, Cz = 1.035, and the measured Hall voltages from 4 Hall plates into (11) and (12), both accurate angles and absolute strength of the external magnetic field can therefore be measured. The simulation of three-axis angular sensor is conducted in COMSOL and the results of inclination angle α and θ are shown in Figs.…”

Section: B Design and Simulation Of Three-axis Hall Sensormentioning

confidence: 99%

“…A three axis Hall effect sensors realized by positioning three horizontal Hall plates on three faces of a non-magnetic material cube has been developed [11]. This solution has been improved in the context of accuracy by using three pairs of two Hall plates [12]. Other approaches include combining a horizontal Hall plate and two pairs of vertical Hall sensors to measure z-axis and x,y-axis respectively [13][14].…”

Section: Introductionmentioning

confidence: 99%

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Modeling of Three-Axis Hall Effect Sensors Based on Integrated Magnetic Concentrator

Fan

Nabaei

et al. 2020

IEEE Sensors J.

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In this paper, we develop computational model to analyze the magnetic concentrating effect of integrated magnetic concentrator (IMC) on surrounding external magnetic field. We present an IMC-based three-axis Hall sensor model that enables to measure both inclination angles and absolute strength of a random external magnetic field. An IMC changes surrounding parallel magnetic components into perpendicular components, and therefore allows the horizontal Hall plates to measure both the strength and inclination angles of parallel external magnetic fields. We develop a finite element method (FEM) based model in COMSOL Multiphysics for the three-axis Hall sensor. Key factors influencing IMC's magnetic concentrating effect, including material property and sensor structure, are investigated and discussed using the developed model. Comparing to traditional IMC-based three-axis angular sensors, a reference permanent magnet is no longer needed in the sensor. A measurement accuracy of 0.8 and 1.2 degrees are achieved respectively for the angles of α and θ of external magnetic field.

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Section: B Design and Simulation Of Three-axis Hall Sensormentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

Modeling of Three-Axis Hall Effect Sensors Based on Integrated Magnetic Concentrator

Fan

Nabaei

et al. 2020

IEEE Sensors J.

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“…Hall sensors are widely used in industrial control, consumer electronics, biodefense, medical diagnostics, food safety, environmental monitoring and other elds due to their simple structure and low cost. The principle of realizing magnetic sensors includes Hall effect, 1,2 and magnetoresistance effect. 3 The Hall effect can be described as when the current in a conductor or semiconductor passes through an external magnetic eld, the movement of carriers is affected by the Lorentz force and shis.…”

Section: Introductionmentioning

confidence: 99%

Detection techniques of biological and chemical Hall sensors

et al. 2021

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“…In order to realize the measurement of a magnetic field in the x , y , and z directions, multiple horizontal Hall devices are placed in different directions [ 5 , 6 ]. However, the drawbacks of this method are the complicated package and the high cost.…”

Section: Introductionmentioning

confidence: 99%

A New Design of a Single-Device 3D Hall Sensor: Cross-Shaped 3D Hall Sensor

Tang

Lyu

Wang

et al. 2018

Sensors

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In this paper, a new single-device three-dimensional (3D) Hall sensor called a cross-shaped 3D Hall device is designed based on the five-contact vertical Hall device. Some of the device parameters are based on 0.18 μm BCDliteTM technology provided by GLOBALFOUNDRIES. Two-dimensional (2D) and 3D finite element models implemented in COMSOL are applied to understand the device behavior under a constant magnetic field. Besides this, the influence of the sensing contacts, active region’s depth, and P-type layers are taken into account by analyzing the distribution of the voltage along the top edge and the current density inside the devices. Due to the short-circuiting effect, the sensing contacts lead to degradation in sensitivities. The P-type layers and a deeper active region in turn are responsible for the improvement of sensitivities. To distinguish the P-type layer from the active region which plays the dominant role in reducing the short-circuiting effect, the current-related sensitivity of the top edge (Stop) is defined. It is found that the short-circuiting effect fades as the depth of the active region grows. Despite the P-type layers, the behavior changes a little. When the depth of the active region is 7 μm and the thickness of the P-type layers is 3 μm, the sensitivities in the x, y, and z directions can reach 91.70 V/AT, 92.36 V/AT, and 87.10 V/AT, respectively.

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Design and fabrication of an innovative three-axis Hall sensor

Cited by 42 publications

References 16 publications

Modeling of Three-Axis Hall Effect Sensors Based on Integrated Magnetic Concentrator

Modeling of Three-Axis Hall Effect Sensors Based on Integrated Magnetic Concentrator

Detection techniques of biological and chemical Hall sensors

A New Design of a Single-Device 3D Hall Sensor: Cross-Shaped 3D Hall Sensor

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