Design and fabrication of an ac-electro-osmosis micropump with 3D high-aspect-ratio electrodes using only SU-8

Rouabah, Hamza A.; Park, Benjamin Y.; Zaouk, Rabih; Morgan, Hywel; Madou, Marc; Green, Nicolas G.

doi:10.1088/0960-1317/21/3/035018

Cited by 27 publications

(18 citation statements)

References 30 publications

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“…34 The devices demonstrated here could inspire new strategies for resolving the intrinsic problem of low throughput of nanosensors. 38 With further investigation and optimization, i.e., application of the 3D electrodes instead of 2D planar electrodes, 39,40 integration with a microfluidic device, automation of optical analysis, and use of multiple functionalized QDs, the QD-nanowire assemblies could detect various analyte molecules in a rational, sensitive, multiplex, and efficient manner. Among all the aforementioned improvements, it is especially interesting to assemble the nanowire-QD hybrid sensors into 3-D structures in the detection system.…”

Section: A)mentioning

confidence: 99%

Location deterministic biosensing from quantum-dot-nanowire assemblies

Liu¹,

Kim

Fan

2014

Applied Physics Letters

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Semiconductor quantum dots (QDs) with high fluorescent brightness, stability, and tunable sizes, have received considerable interest for imaging, sensing, and delivery of biomolecules. In this research, we demonstrate location deterministic biochemical detection from arrays of QD-nanowire hybrid assemblies. QDs with diameters less than 10 nm are manipulated and precisely positioned on the tips of the assembled Gold (Au) nanowires. The manipulation mechanisms are quantitatively understood as the synergetic effects of dielectrophoretic (DEP) and alternating current electroosmosis (ACEO) due to AC electric fields. The QD-nanowire hybrid sensors operate uniquely by concentrating bioanalytes to QDs on the tips of nanowires before detection, offering much enhanced efficiency and sensitivity, in addition to the position-predictable rationality. This research could result in advances in QD-based biomedical detection and inspires an innovative approach for fabricating various QD-based nanodevices.

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Section: A)mentioning

confidence: 99%

Location deterministic biosensing from quantum-dot-nanowire assemblies

Liu¹,

Kim

Fan

2014

Applied Physics Letters

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“…SU-8 is a negative, ultraviolet (UV) photoresist based on epoxy resin. Because thick SU-8 has excellent mechanical properties, resistance to solvents, chemical stability and optical properties, it has become a popular photoresist material for the fabrication of many microelectromechanical system (MEMS) structures and devices [1][2][3][4][5][6]. Polydimethylsiloxane (PDMS) [7] microfluidic channels are an application of SU-8 microstructures [8].…”

Section: Introductionmentioning

confidence: 99%

Multi-layer lithography using focal plane changing for SU-8 microstructures

Chen

Zhou

Zheng

et al. 2020

Mater. Res. Express

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In this paper, we report on a type of SU-8 microstructure with vertical sidewalls used for polydimethydiloxane (PDMS) microchannels. Multi-layer lithography using focal plane changing approach is proposed to expose the SU-8 photoresist based on a digital micromirror device (DMD) maskless lithography system. We used a light-emitting diode source with a wavelength of 405 nm. The thickness of the SU-8 is divided into multi-layers according to the depth of focus. Each layer corresponds to a depth of focus, and then, a virtual mask is designed for the layer. Finally, each layer is exposed to changes in the focal plane. The results indicate that the actual profile of the SU-8 mold shows good agreement with the design profile without any T-profiles. Additionally, there is better linewidth in the proposed method compared with multi-exposure by a single fixed focal plane. The PDMS microchannels result also demonstrate the stability of the SU-8 mold.

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“…In the dynamic-type, the pumping is based on interactions between either electric or magnetic field and the working fluid. This time, dynamic micropumps can be easily divided into two main groups, i.e., EHD pumps (Seo, et al, 2007, Raghavan, et al, 2009, Singhal and Garimella, 2007 (Abe, et al, 2007, Kim, et al, 2011, Yokota, 2013 and Electroosmotic pumps (Guo, et al, 2011, Borowsky, et al, 2008, Rouabah, et al, 2011, Stoterau, et al, 2010. Concerning papers of EHD pumps (Abe, et al, 2007, Kim, et al, 2011, Yokota, 2013 , details are mentioned later in the next section.…”

Section: Dynamic-type Micropumpsmentioning

confidence: 99%

A review on micropumps from the viewpoint of volumetric power density

Yokota

2014

Mechanical Engineering Reviews

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Micropump is one of critical devices in composing high-performance micro-fluid systems like micro hydraulics, fluid-driven micro machines, micro liquid forced cooling of electrical components, µTAS(Micro total analysis systems), LOC(Lab-on a-chip), micro dosing system and so on. A lot of principles are proposed to develop micropumps in these 30 years. At the same time, many review papers on many kinds of micropumps were published in these 20 years, however, in these 8 years there are little review papers on micropumps, particularly from the point of power density view. Here, first, we survey some recent review articles on the progress of micropumps over the past 25 years. Secondly, we attempt to provide the review on latest trend on micropump researches in these 8 years. Finally, we introduce some powerful micropumps as a power source of micro hydraulics. From the point of view that the micropump can be power source as a micro hydraulics, the state of the art micropumps and their power densities are discussed. Much progress has been made, however, with micropumps suitable for primary applications still not available, it seems that this remains a developing and productive area for future research.

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Design and fabrication of an ac-electro-osmosis micropump with 3D high-aspect-ratio electrodes using only SU-8

Cited by 27 publications

References 30 publications

Location deterministic biosensing from quantum-dot-nanowire assemblies

Location deterministic biosensing from quantum-dot-nanowire assemblies

Multi-layer lithography using focal plane changing for SU-8 microstructures

A review on micropumps from the viewpoint of volumetric power density

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