Design and Fabrication of an SOI Optical Switch with Backside Release for Anti-high-Overload

Xie, Jin; Liu, Zhenhua; Zhang, Xiao; Cao, Jun; Dai, Jun; Zeng, Chao

doi:10.1007/978-981-97-0922-9_165

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Advances in Mechanical Design

2024

DOI: 10.1007/978-981-97-0922-9_165

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Design and Fabrication of an SOI Optical Switch with Backside Release for Anti-high-Overload

Jin Xie,

Zhenhua Liu,

Xiao Zhang

et al.

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Design and Fabrication of an SOI Optical Switch with Backside Release for Anti-high-Overload

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References 15 publications

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