The check valve micropump can easily reach a high-flow rate, and it has promising application prospects in microfluidic devices and artificial organs. There are several vibrating parts in the check valve pump, including the actuator, membrane and valves. The vibration performances of these parts have a coupling influence on the performance of the micropump. In the work reported in this Letter, four kinds of micropumps with different valves and actuators were designed and fabricated, and the vibration performances of the vibrating parts were analysed by the finite element method. Then, the performances of each kind of micropump were studied by frequency sweeping experiments. The factors affecting micropump performance were determined, and the experimental results approximately coincide with the theoretical analysis. This research provides a theoretical and experimental basis for the design and optimisation of the micropump.
Introduction:The micropump, as an actuator for microfluid transmission and control, has been widely used in drug delivery, biological and chemical analysis and microelectronics cooling [1,2]. The reciprocating micropump is the most extensively studied micropump, and it can basically be divided into two types: the check valve micropump and the valveless micropump. The valveless micropump is hard to enlarge and it is difficult to precisely control the flow rate because of its inherent issues such as back flow and random flow. However, the micropump with valves can reach a high-flow rate and also can realise linear control. In addition, it has mature manufacturing technology [2,3].The general actuation mechanisms of reciprocating micropumps include piezoelectric [4,5], electrostatic [6], electromagnetic [7], thermo-pneumatic [8] and shape memory alloy (SMA) actuation [9] and so on. Compared with other actuations, piezoelectric actuation has many merits such as large actuation force, fast response time, good reliability, a simple structure, is miniature and of light weight. Therefore piezoelectric actuation is the most commonly used drive mode, and the piezoelectric micropump has promising application prospects.The performance of the micropump actuated by PbZrTiO 3 (PZT) is affected by many factors. The previous studied mainly focused on static factors such as voltage, valve thickness, channel shape, membrane thickness and so on. Several researches have studied the influence of the actuator on the performance of the micropump, however most of them were for valveless micropumps [10][11][12]. Among the few researches of micropumps with valves, the influences of these components were separately analysed [13], or the valves were assumed to be working perfectly so ignored for analysis [14].In the micropump, there are several vibrating parts including the PZT actuator, membrane and valves. The vibration performances of the vibrating parts have a coupling influence on micropump performance, but few researches of this aspect have been reported. Hence, it is necessary to perform a comprehensive analysis to ...