Design and fabrication of a micro magnetic bearing

2004

The author wishes to thank the following individuals for their contributions: • Rajen Chanchani (1745) for overseeing the implementation of the BCB/Cu HDI process at Sandia and the lithographic fabrication of the stator windings in this project. • Denise B. Webb (1745) for fabricating the wafers. • Donald Bethke (1745) for assisting with the wafer processing. • Cynthia D. Blain (2339) for soldering leads on to the wafer. • Michael P. Saavedra (14184) for cutting the permanent magnets on the micro-EDM machine. • Thomas K. Mayer (15252) for designing and fabricating the actuator test stand.

Section: Introductionmentioning

confidence: 99%

“…As the separation between the electrodes decreases below 10 µm at constant atmospheric pressure, the breakdown voltage increases according to Paschen's curve [5,6]. Substituting the breakdown voltages of Paschen's curve into (4) yields the maximum EQS energy density curve shown in Figure 1.…”

Section: Introductionmentioning

confidence: 99%

Mesoscale wide-bandwidth linear magnetic actuators : an LDRD final report.

2004

“…1 has been prototyped at Royal Melbourne Institute of Technology, which has been reported in Ref. 1 with an emphasis on fabrication issues. This paper further investigates the design and control problems of this micro actuator.…”

Section: Introductionmentioning

confidence: 99%

Modeling and control of a micro magnetic bearing

Qin

Zmood

Nano- And Microtechnology: Materials, Processes, Packaging, and Systems

et al. 2002

A prototype micro magnetic bearing actuator having an outside diameter of 2.6 mm has been fabricated at Royal Melbourne Institute of Technology and reported previously with an emphasis on fabrication issues. The discussion of this paper will focus on the design and control of the micro magnetic bearing with a particular emphasis on control system design and analysis. To this end, a simplified dynamic model for the micro actuator has been developed and used in determining controller parameters, leading to a successfully suspended non-rotating rotor in the micro magnetic bearing system.

“…To this end, a prototype micro magnetic bearing shown in Fig. 1 has been developed at RMIT and has been reported in the literature 1 . In this magnetic bearing system two sensor coils were placed along each of the two radial directions for measuring the rotor radial displacements.…”

Section: Introductionmentioning

confidence: 99%

Micro displacement sensing system and its application to micro magnetic bearings

Qin

Zmood²,

et al. 2001

SPIE Proceedings

In this paper we present a novel displacement sensing system where the sensing direction is in the plane of the planar sensor coils. Particular emphasis in this work is given to the design and micro fabrication of the sensor coils.Preliminary analysis and experiments have been carried out to determine the most suitable geometry and number of turns for the sensor coils. It has been found that the position of the sensor coils is extremely important as the location of the sensor coils relative to the target significantly affects the sensitivity of the resultant sensing system. Extensive experiments have been carried out using a number of different coil geometries with the same signal conditioner in each case. These experiments show that best sensitivity is achieved when the sensor coil is located so that the overlap area between the rotor and the sensor coil turns changes most rapidly with the rotor displacement. Following the preliminary analysis and experiments, new optimized sensor coils have been designed and micro fabricated using UV lithography and electroplating, as detailed in the paper.Performance testing of the resultant sensing system has been carried out and is reported in the paper. In addition, the displacement system has been applied to a micro magnetic bearing system for suspending a micro rotor.