Design and fabrication of a new two-dimensional pneumatic micro-conveyor

Zeggari, Rabah; Yahiaoui, Riad; Malapert, Julien; Manceau, Jean-François

doi:10.1016/j.sna.2010.09.013

Cited by 24 publications

(19 citation statements)

References 10 publications

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“…The values of losses are similar in opposite directions. The value of losses are greater for the north-south directions due to the smaller size of channels inside the second layer [14]. …”

Section: Characterization Of Flowmentioning

confidence: 99%

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Micropositioning and Fast Transport Using a Contactless Micro-Conveyor

et al. 2014

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Abstract:The micro-conveyor is a 9 × 9 mm 2 manipulation surface able to move millimeter-sized planar objects in the four cardinal directions using air flows. Thanks to a specific design, the air flow comes through a network of micro-channels connected to an array of micro-nozzles. Thus, the micro-conveyor generates an array of tilted air jets that lifts and moves the object in the required direction. In this paper, we characterize the device for transport and positioning tasks and evaluate its performances in terms of speed, resolution and repeatability. We show that the micro-conveyor is able to move the object with a speed up to 137 mm · s −1 in less than 100 ms whereas the positioning repeatability is around 17.7 µm with feedback control. The smallest step the object can do is 0.3 µm (positioning resolution). Moreover, we estimated thanks to a dynamic model that the speed could reach 456 mm · s −1 if several micro-conveyors were used to form a conveying line.

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“…The values of losses are similar in opposite directions. The value of losses are greater for the north-south directions due to the smaller size of channels inside the second layer [14]. …”

Section: Characterization Of Flowmentioning

confidence: 99%

“…• from the vertical [13,14]. The orientation of the air jets is due to the shift of the holes in the upper wafer.…”

Section: Introductionmentioning

confidence: 99%

Micropositioning and Fast Transport Using a Contactless Micro-Conveyor

et al. 2014

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“…Recently, Yahiaoui et al [54,55] proposed a microconveyor concept and its implementation. The microconveyor is a 9 × 9 mm 2 surface able to move millimetersized planar objects in the four cardinal directions using air flows.…”

Section: Tilted Air-jet Manipulatorsmentioning

confidence: 99%

A survey of non-prehensile pneumatic manipulation surfaces: principles, models and control

Laurent

Moon

2015

Intel Serv Robotics

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Many manipulation systems using air flow have been proposed for object handling in a non-prehensile way and without solid-to-solid contact. Potential applications include high-speed transport of fragile and clean products and high-resolution positioning of thin delicate objects. This paper discusses a comprehensive survey of state-of-the-art pneumatic manipulation from the macro scale to the micro scale. The working principles and actuation methods of previously developed air-bearing surfaces, ultra-sonic bearing surfaces, air-flow manipulators, air-film manipulators, and tilted air-jet manipulators are reviewed with a particular emphasis on the modeling and the control issues. The performance of the previously developed devices are compared quantitatively and open problems in pneumatic manipulation are discussed.

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“…Moreover, some devices were also developed on a microscopic scale. Zeggari et al 16 presented a study on design, fabrication, and operation of a two-dimensional air conveyor to manipulate small flat objects using tilted air jets. Fukuta et al 17 presented an array of MEMS-based actuators for distributed micromanipulation by generating and controlling the air-flow force field.…”

Section: Introductionmentioning

confidence: 99%

Study on the basic characteristics of a contactless air film conveyor using viscous traction

Zhong

et al. 2016

Proceedings of the Institution of Mechanical Engineers, Part J:

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Many industries require contactless transport of delicate or clean products such as silicon wafers, flat foodstuffs and freshly painted objects. In this study, a contactless air film conveyor for flat objects is introduced. The object is supported by a thin film formed between the object and the conveyor surface and transported by viscous traction which is generated by controlled airflow underneath the object. Experimental and theoretical investigations are conducted on the basic characteristics (flow rate characteristics, film pressure distribution and viscous force). A theoretical model based on Reynolds equation coupling with incompressible Navier-Stokes equation is established to help analyze and understand these characteristics. The results show that air film pressure is symmetrically distributed along the direction perpendicular to the airflow in the actuating cells and non-symmetrically distributed along the airflow direction. The viscous force obtained by differentiating the pressure distribution implies that it consists of an actuating force produced by airflow in the pockets and a drag force resulted from airflow across the dam area. In addition, the influences on the viscous force from gap thickness, suction flow rate, inner bulge and depth of the pocket are discussed.

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Design and fabrication of a new two-dimensional pneumatic micro-conveyor

Cited by 24 publications

References 10 publications

Micropositioning and Fast Transport Using a Contactless Micro-Conveyor

Micropositioning and Fast Transport Using a Contactless Micro-Conveyor

A survey of non-prehensile pneumatic manipulation surfaces: principles, models and control

Study on the basic characteristics of a contactless air film conveyor using viscous traction

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