2012
DOI: 10.3233/jae-2012-1498
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Design and fabrication of a microactuator for a hearing aid

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“…However, multiple reflective surfaces result in large mirror and driving motor sizes; thus, it is difficult to realize the merits of low power consumption and compact size at the same time. The MEMS technique used in semiconductor processing has used in micro sensors and actuators [2,3], and this technique is an ideal method for developing thin optical scanners [4][5][6][7][8][9]. However, the use of piezoelectric or electrostatic elements to drive a MEMS scanner generally requires a high voltage in the electronic circuitry, which is difficult to achieve in low-cost portable devices [7][8][9].…”
Section: Introductionmentioning
confidence: 99%
“…However, multiple reflective surfaces result in large mirror and driving motor sizes; thus, it is difficult to realize the merits of low power consumption and compact size at the same time. The MEMS technique used in semiconductor processing has used in micro sensors and actuators [2,3], and this technique is an ideal method for developing thin optical scanners [4][5][6][7][8][9]. However, the use of piezoelectric or electrostatic elements to drive a MEMS scanner generally requires a high voltage in the electronic circuitry, which is difficult to achieve in low-cost portable devices [7][8][9].…”
Section: Introductionmentioning
confidence: 99%