“…Inchworm actuation is regarded as a bionic actuation, which imitates the motion of the inchworm insect, and it can simultaneously obtain large stroke and high-resolution characteristics; [48,[90][91][92][93][94][95] in general, it contains two clamping units and one feeding unit, as shown in Figure 4, so it has complex structure.…”
Piezoelectric actuation technology has been widely used in various precise‐oriented fields. Its notable advantages include high resolution, rapid response speed, output force with high density, and immunity to electromagnetic interference. Characteristics of cross‐scale and multiple‐degree‐of‐freedom (multi‐DOF) output motions are of utmost importance in the context of micro‐/nanopositioning technology. For decades, researchers have been working to develop various piezoelectric devices that exploit these important properties. In this review, a comprehensive review of recent research efforts in the field of cross‐scale multi‐DOF piezoelectric drive technology is provided. To commence, it provides an in‐depth exploration of the unique advantages associated with piezoelectric actuation, demonstrating them through comparative analyses with alternative actuation methods. Subsequently, the complexity of piezoelectric cross‐scale motion is introduced, and the multi‐DOF piezoelectric motion is classified in detail. Furthermore, the practical applications of multi‐DOF cross‐scale piezoelectric actuation technology are systematically elucidated, highlighting its versatility and suitability in real‐world environments. Finally, an in‐depth discussion that addresses the challenges encountered in the field is provided, and the prospective directions for further developments in piezoelectric actuation technology are outlined. This scholarly contribution plays an important role in guiding future research and innovative initiatives.
“…Inchworm actuation is regarded as a bionic actuation, which imitates the motion of the inchworm insect, and it can simultaneously obtain large stroke and high-resolution characteristics; [48,[90][91][92][93][94][95] in general, it contains two clamping units and one feeding unit, as shown in Figure 4, so it has complex structure.…”
Piezoelectric actuation technology has been widely used in various precise‐oriented fields. Its notable advantages include high resolution, rapid response speed, output force with high density, and immunity to electromagnetic interference. Characteristics of cross‐scale and multiple‐degree‐of‐freedom (multi‐DOF) output motions are of utmost importance in the context of micro‐/nanopositioning technology. For decades, researchers have been working to develop various piezoelectric devices that exploit these important properties. In this review, a comprehensive review of recent research efforts in the field of cross‐scale multi‐DOF piezoelectric drive technology is provided. To commence, it provides an in‐depth exploration of the unique advantages associated with piezoelectric actuation, demonstrating them through comparative analyses with alternative actuation methods. Subsequently, the complexity of piezoelectric cross‐scale motion is introduced, and the multi‐DOF piezoelectric motion is classified in detail. Furthermore, the practical applications of multi‐DOF cross‐scale piezoelectric actuation technology are systematically elucidated, highlighting its versatility and suitability in real‐world environments. Finally, an in‐depth discussion that addresses the challenges encountered in the field is provided, and the prospective directions for further developments in piezoelectric actuation technology are outlined. This scholarly contribution plays an important role in guiding future research and innovative initiatives.
“…For MPRs, there are two conversion processes to achieve their continuous motions. [ 73 , 74 ] One process is to transform the applied electrical energy into micro deformations of the piezoelectric actuating elements based on the inverse piezoelectric effect; the other is to convert the micro deformations of the piezoelectric actuating elements into the micro stepping motions of MPRs by the friction, inertial, or press forces; and the continuous motions of MPRs can be achieved by accumulating the micro stepping motions. Such conversion processes based on the inverse piezoelectric effect are the unique feature of MPRs that is different from other types of miniature robots.…”
Section: Overview and Classifications Of Mprsmentioning
Miniature robots have been widely studied and applied in the fields of search and rescue, reconnaissance, micromanipulation, and even the interior of the human body benefiting from their highlight features of small size, light weight, and agile movement. With the development of new smart materials, many functional actuating elements have been proposed to construct miniature robots. Compared with other actuating elements, piezoelectric actuating elements have the advantages of compact structure, high power density, fast response, high resolution, and no electromagnetic interference, which make them greatly suitable for actuating miniature robots, and capture the attentions and favor of numerous scholars. In this paper, a comprehensive review of recent developments in miniature piezoelectric robots (MPRs) is provided. The MPRs are classified and summarized in detail from three aspects of operating environment, structure of piezoelectric actuating element, and working principle. In addition, new manufacturing methods and piezoelectric materials in MPRs, as well as the application situations, are sorted out and outlined. Finally, the challenges and future trends of MPRs are evaluated and discussed. It is hoped that this review will be of great assistance for determining appropriate designs and guiding future developments of MPRs, and provide a destination board to the researchers interested in MPRs.
“…The actuator based on the stick-slip drive principle is widely used in ultra-precision machining, microelectronics manufacturing, aerospace, and other fields because of its advantages of no electromagnetic interference, high precision and simple structure (Hu et al, 2020; Li et al, 2021; Tian et al, 2022). The power source of piezoelectric stick-slip drive technology is friction (Deng et al, 2023). The difference between the dynamic and static friction forces caused by the asymmetric motion of the actuator is used to produce small displacements of the slider.…”
A new stick-slip type piezoelectric actuator based on asymmetric structure is proposed. The actuator uses a stator with the asymmetric diamond-shaped structure, and the structure size is determined by finite element simulation. First, the structure and working principle of the proposed actuator are introduced. The elongation deformation of the piezo stack is transferred to the driving tip by the used asymmetric diamond-shaped hinge. This produces a diagonal movement on the driving tip, with the lateral motion used for driving and the longitudinal motion used for pressing the slider, respectively. Then, the statics analysis of the proposed piezoelectric actuator is performed by finite element simulation. The simulated displacements of the driving tip under different structures are obtained, and then the structure size is determined. Finally, an experimental system is established to study the performance of the proposed piezoelectric actuator. The experimental results show that the maximum output velocity of the proposed actuator is 5.26 mm/s. The maximum output force is 1.9N when the locking force is 2N and the drive frequency is 660 Hz.
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