2017
DOI: 10.1016/j.optlaseng.2016.10.026
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Design and experimental verification of novel six-degree-of freedom geometric error measurement system for linear stage

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Cited by 49 publications
(35 citation statements)
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“…After matrix operations, the two tilt error sums C α ε and C β ε of C-axis were obtained as stated in Equations (21) and (22), in which the position error of A-axis was taken as a known constant. Equation (19) was obtained based on the coordinate transformation relationship between actual spherical point coordinate P 1 in W rC and two sets of spherical points S 1 , S 1 , S 2 , S 2 in W iC as:…”
Section: R C R T R a R T T S R T R A R T T Smentioning
confidence: 99%
See 1 more Smart Citation
“…After matrix operations, the two tilt error sums C α ε and C β ε of C-axis were obtained as stated in Equations (21) and (22), in which the position error of A-axis was taken as a known constant. Equation (19) was obtained based on the coordinate transformation relationship between actual spherical point coordinate P 1 in W rC and two sets of spherical points S 1 , S 1 , S 2 , S 2 in W iC as:…”
Section: R C R T R a R T T S R T R A R T T Smentioning
confidence: 99%
“…In the study of the geometric error measurement and identification methods of five-axis machine tools, the positioning error of each linear axis, two straightness errors, three corner errors, and the perpendicularity between the two axes can be directly measured by a laser interferometer or other optical measuring systems [19][20][21]. Laser tracer technology is used for the volumetric error mapping and compensation of geometric errors of machine tools [22].…”
Section: Introductionmentioning
confidence: 99%
“…Comparison results of direct and indirect methods for geometric error measurement [30,31] indicate that because of ignoring angle errors, researches above lack completeness of geometric errors [32]. For example, Chen designed a novel six-degree-of freedom geometric error measurement system for a linear stage [33]. Hsieh designed a geometric error measurement system for linear guideway assembly and calibration [34].…”
Section: Introductionmentioning
confidence: 99%
“…The commonly used measuring instruments or methods include laser, Hall sensor, inertial measurement unit (IMU), total station, and vision. Laser measurement methods, which include laser interferometer [ 2 ], laser tracker [ 3 ], and laser collimation method [ 4 ], have high accuracy, but a special optical path needs to be designed using a lens [ 5 , 6 , 7 ]. As a result, it has requirements on the size or range of motion of the measured object.…”
Section: Introductionmentioning
confidence: 99%