Design and experimental study of a novel three-way diffuser/nozzle elements employed in valveless piezoelectric micropumps

Yuan, Shouqi; Yang, Songlan; He, Xiuhua; Deng, Zhaoqun; Cai, Shengchuan

doi:10.1007/s40430-014-0176-5

Cited by 17 publications

(9 citation statements)

References 10 publications

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“…In formulas (10) and (11), ξ n and ξ d are the pressure loss coefficients at the diffusion and constriction tubes.…”

Section: Relationship Between Pump Chamber Height and Flow Ratementioning

confidence: 99%

“…Piezoelectric material is a typical smart material with the advantages of fast response, high endurance [1][2][3], good stability, good controllability [4][5][6][7], and no electromagnetic interference [8,9], which has been widely used in engineering and medical fields [10]. Typical applications include piezoelectric sensors, piezoelectric micropumps, and ultrasonic detectors [11]. In microelectronic systems, valveless piezoelectric pumps offer advantages over valved piezoelectric pumps in terms of ease of integration, precise control, and the absence of * Author to whom any correspondence should be addressed.…”

Section: Introductionmentioning

confidence: 99%

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Performance analysis of synthetic jet micropump based on double piezoelectric actuators

Hu¹,

He²,

Hu³

et al. 2022

J. Micromech. Microeng.

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To alleviate the problem of low flow rates of synthetic jet piezoelectric pumps for liquid medium, a double piezoelectric synthetic jet micropump (DPSJM) is proposed. DPSJM generates pressure change in the pump chamber by the high voltage vibration of the double piezoelectric actuators. Theoretical models are used to analyze the factors affecting the performance of DPSJM. The flow field is analyzed by using the finite element method in the jet chamber, and the prototype is built and tested. The results show that the performance of the DPSJM is best with double piezoelectric actuators with a sine wave drive signal and a pump chamber height of 1mm. The highest flow rate comes to 22.11ml/min at 175V, 65Hz. Moreover, the DPSJM is simple in construction. when compared to other types of valveless piezoelectric pumps, there was no resistance fluid in the pump chamber, which could significantly reduce the damage to the transfer medium.

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“…In formulas (10) and (11), ξ n and ξ d are the pressure loss coefficients at the diffusion and constriction tubes.…”

Section: Relationship Between Pump Chamber Height and Flow Ratementioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

Performance analysis of synthetic jet micropump based on double piezoelectric actuators

Hu¹,

He²,

Hu³

et al. 2022

J. Micromech. Microeng.

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“…According to Abramovich's maximum flow principle, 11 the relationship between spiral groove and through-hole in the inner-rotation nozzle was shown as…”

Section: Structure Of Inner-rotation Nozzle and Working Principlementioning

confidence: 99%

Design and optimization of inner-rotation nozzle in negative pressure duster

Zhai

Ren

Wei

2019

Advances in Mechanical Engineering

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This article proposes a design and experimental method of a new inner-rotation nozzle. First, the design model of the inner-rotation nozzle was established based on Abramovich’s maximum flow principle and high-pressure water jet crushing theory. Considering the specific conditions of the negative pressure duster, the reference values of nozzle structure parameters are calculated. The simulation is conducted for studying the relationship between the nozzle’s structure parameters and its performance including water flow velocity at nozzle outlet, atomization effects, and so on. By orthogonal experiment, the reasonable nozzle structure parameters were obtained by analyzing the speed of flow, the amount of air, and so on. Then, a series of nozzles were machined with different size shells and cores. In order to select out the optimum matching of nozzle cores and shells, an experimental system is established. Considering the installation location, wind speed, liquid–gas ratio, and other factors, the optimum matching of the shell core was chosen. At the same time, the application test of the negative pressure duster was carried out on the fully mechanized mining face. The research results show that the removal rate of pulverized coal has a higher improvement, and provides a theoretical basis for the design of negative pressure duster.

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“…Heschel et al 32 made diffuser/nozzle microstructures in Silicon by reactive ion etching, and the method was applied for fabricating the microchannel and micropump. 9,33,34 Figure 3 is an illustration of the fabrication process of the diffuser/nozzles. First, the positive photoresist (Shipley 6112) is sputtered on the surface of a silicon wafer with a thickness of 450 mm.…”

Section: Fabrication Of Flat-walled Diffuser/nozzlementioning

confidence: 99%

Experimental and numerical study of flow characteristics of flat-walled diffuser/nozzles for valveless piezoelectric micropumps

Cai

Deng

et al. 2016

Proceedings of the Institution of Mechanical Engineers, Part C:

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The flat-walled diffuser/nozzles are classified into two types, i.e. Tube I and Tube II, based on their different flow resistance characteristics. Tube I has less pressure loss coefficients in the diffuser direction than the nozzle direction, and Tube II has larger pressure loss coefficients in the diffuser direction than the nozzle direction. This work focuses on the characterization of the diffuser efficiency, and flow rectification of these two types of diffuser/nozzles. The characterization is performed with diverging angles in the range of 5°–60° and length–width ratios in the range of 1–20, and the pressure drop ranging from 1 to 10 kPa. The results show that with the increase in pressure drop and the decrease in length–width ratio, Tube I type of diffuser/nozzles can change to Tube II. For Tube I type of diffuser/nozzles, the smaller the diverging angle and the longer the length, the better the performance. For Tube II type of diffuser/nozzles, the larger the diverging angle and shorter the length, the better the flow rectification performance. Simulation results match well with the experiment data. Of particular interest, simulation of the diffuser flow fields suggests that the flow separation has a significant impact on pressure loss coefficients in the diffuser direction.

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Design and experimental study of a novel three-way diffuser/nozzle elements employed in valveless piezoelectric micropumps

Cited by 17 publications

References 10 publications

Performance analysis of synthetic jet micropump based on double piezoelectric actuators

Performance analysis of synthetic jet micropump based on double piezoelectric actuators

Design and optimization of inner-rotation nozzle in negative pressure duster

Experimental and numerical study of flow characteristics of flat-walled diffuser/nozzles for valveless piezoelectric micropumps

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