Design and experimental study of acceleration sensor based on PVDF piezoelectric film

Abstract

PVDF piezoelectric film is a piezoelectric polymer material with excellent properties. In this paper, the research status of PVDF piezoelectric thin film was summarized, and the working principle of PVDF piezoelectric thin film accelerometer was introduced. On the basis of optimizing parameters, a cantilever PVDF piezoelectric film accelerometer and signal processing circuit were designed. The signal processing circuit which was composed of amplifier circuit and filter circuit was analyzed experimentally,and the frequency characteristic diagram of the filter circuit was obtained.The amplitude-frequency and phase-frequency characteristics of the filter circuit were better in a certain range,which can meet the design requirements.Experiments on the designed PVDF piezoelectric film accelerometer were carried out, including the calibration experiment of the PVDF accelerometer and the performance test of the sensor.The analysis results showed that the sensor has high sensitivity and good linearity, and can meet the measurement requirements.

Polymeric piezoelectric accelerometers with high sensitivity, broad bandwidth, and low noise density for organic electronics and wearable microsystems

“…Figure 1 shows that a single polymeric piezoelectric accelerometer features an array of six identical cantilever sensing units that are electrically connected in parallel, with their piezoelectric charge responses summed for the output. Compared with other existing polymeric piezoelectric accelerometers 27 , 28 , 30 – 32 , this array-based design enable the significant reduction of the planar dimensions of the individual units, achieving miniaturization for a high resonant frequency while maintaining a comparable total effective sensing area to obtain high sensitivity. The number of sensing units is set to six, the same as in our previous design 29 .…”

“…Piezoelectric polymers undeniably lack the mechanical and piezoelectric properties of PZT 26 . Consequently, most polymeric accelerometers [27][28][29][30][31][32] have resorted to lower resonant frequencies to rival PZT-based accelerometers in terms of sensitivity. However, this design strategy leads to reduced bandwidth and increased noise density 33 .…”

“…However, this design strategy leads to reduced bandwidth and increased noise density 33 . Most existing polymeric piezoelectric accelerometers [27][28][29][30][31][32] have a flat bandwidth below 100 Hz, preventing them from fulfilling the aforementioned vital role in wearable polymeric vocal assistants.…”

A polymeric piezoelectric MEMS accelerometer with high sensitivity, low noise density, and an innovative manufacturing approach

“…The PVDF-based piezoelectric accelerometer developed by Gong et al 32 also used cantilever-based structures. One highlight of their achievement is the 6-times higher charge sensitivity than the accelerometers presented in this article.…”

“…As shown in Table 2 , the sensing area of their device is 5 times larger than that of the MEMS accelerometer presented in this work. In addition, their PVDF film is twice as thick (200 µm) 32 . As per Eq.…”