Design and experiment of a piezoelectric actuator based on inchworm working principle

Dong, Hangjia; Li, Tuanjie; Wang, Zuowei; Ning, Yuming

doi:10.1016/j.sna.2020.111950

Cited by 38 publications

(17 citation statements)

References 15 publications

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“…Inchworm actuators have high thrust and high resolution [ 26 , 27 , 28 ], and utilizing the inchworm principle increases the stroke by accumulating paces of the actuator and can obtain very high resolution within one pace [ 29 , 30 ]. In the existing research on inchworm actuators [ 31 , 32 ], the way to realize clamping and release mainly depends on the deformation of laminated piezoelectric ceramics or the deformation of mechanical amplification mechanism actuated by laminated piezoelectric ceramics.…”

Section: Introductionmentioning

confidence: 99%

Long Stroke Design of Piezoelectric Walking Actuator for Wafer Probe Station

2022

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In order to develop a high-resolution piezoelectric walking actuator with a long stroke for the wafer probe station, this work presents a design of a piezoelectric walking actuator with two auxiliary clamping feet elastically attached to major clamping feet. Its construction was introduced and its operating principle was analyzed. Structure design details were discussed and a prototype was proposed. The prototype was fabricated and tested. The experimental results show that the proposed actuator can operate stably along a 20 mm guider. The proposed design is suitable for precision motion control applications.

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Section: Introductionmentioning

confidence: 99%

Long Stroke Design of Piezoelectric Walking Actuator for Wafer Probe Station

2022

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“…Actuators for shape adjustment can be very needed for mesh antennas. Considering the requirements of shape adjustment, several different types of actuators have been proposed, such as piezoelectric ceramic (PZT) actuators, shape memory alloys, ultrasonic motors and inchworm actuators (Torisaka et al , 2019; Dong et al , 2020). Among them, the inchworm actuator is a preferable technical solution for shape adjustment.…”

Section: Introductionmentioning

confidence: 99%

Numerical calculation of inchworm actuator reliability: effect of space temperature and material parameters

Dong

Li²,

Wang³

et al. 2022

AEAT

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Purpose The inchworm actuator is widely applied in space industry. One of the major issues in space instrumentation is the reliability, especially under space thermal load. The purpose of this paper is to present a numerical calculation method for the inchworm actuator reliability with considering the effect of space temperature. Design/methodology/approach First, the structure of designed inchworm actuator is introduced, and the main failure reason is analyzed. Then the wear model is proposed with considering the space temperature, and an experiment device is designed to verify the wear model. Finally, the reliability calculation method is developed based on the working principle of the inchworm actuator. Findings The numerical calculation method can be applied to calculate the reliability of the inchworm actuator with considering the space temperature. And the results provide a new perspective to discuss the influences of the temperature and driving voltage on the reliability of inchworm actuators. Originality/value This work presents a reliability calculation method of inchworm actuators with considering the space temperature.

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“…1a according to previous studies [21]. However, the inchworm actuator usually needs two sets of clamping units, one set of driving unit and a multi-channel control system, which leads to the problems of complex structure and control system [22]. This limits the practical application of inchworm actuators seriously.…”

Section: Introductionmentioning

confidence: 99%

A Novel Bionic Piezoelectric Actuator Based on the Walrus Motion

Cai

Wan

et al. 2021

J Bionic Eng

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A novel bionic piezoelectric actuator based on the walrus motion to achieve high performance on large working stroke for micro/nano positioning systems is first proposed in this study. The structure of the proposed walrus type piezoelectric actuator is described, and its motion principle is presented in details. An experimental system is set up to verify its feasibility and explore its working performances. Experimental results indicate that the proposed walrus type piezoelectric actuator could realize large working stroke with only one driving unit and one coupled clamping unit; the maximum stepping displacement is ΔLmax = 19.5 μm in the case that the frequency f = 1 Hz and the voltage U = 120 V; the maximum speed Vmax = 2275.2 μm · s−1 when the frequency f = 900 Hz and the voltage U = 120 V; the maximum vertical load mmax = 350 g while the voltage U = 120 V and the frequency f = 1 Hz. This study shows the feasibility of mimicking the bionic motion of the real walrus animal to the design of piezoelectric actuators, which is hopeful for the real application of micro/nano positioning systems to achieve large working stroke and high performance.

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Design and experiment of a piezoelectric actuator based on inchworm working principle

Cited by 38 publications

References 15 publications

Long Stroke Design of Piezoelectric Walking Actuator for Wafer Probe Station

Long Stroke Design of Piezoelectric Walking Actuator for Wafer Probe Station

Numerical calculation of inchworm actuator reliability: effect of space temperature and material parameters

A Novel Bionic Piezoelectric Actuator Based on the Walrus Motion

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