Design and evaluation of a mechanical nanomanufacturing system for nanomilling

Gozen, B. Arda; Özdoğanlar, O. Burak

doi:10.1016/j.precisioneng.2011.06.001

Cited by 81 publications

(36 citation statements)

References 30 publications

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“…Jeong presented an air lubricated hydrostatic sliding mechanism based portable nano probe system [20]. Gozen constructed a nano milling system to fabricate the micro channel [21]. All these designs can realize the micro/nano structure scratching, but they also have obvious drawbacks, such as the overlarge normal load in Lee"s mechanism, the residual friction of the probe shaft in Jeong"s design, and the limitation of machining width in Gozen"s system.…”

Section: Introductionmentioning

confidence: 99%

Experimental investigation of the tip based micro/nano machining

Guo

Tian

Liu

et al. 2017

Applied Surface Science

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Based on the self-developed three dimensional micro/nano machining system, the effects of machining parameters and sample material on micro/nano machining are investigated. The micro/nano machining system is mainly composed of the probe system and micro/nano positioning stage. The former is applied to control the normal load and the latter is utilized to realize high precision motion in the xy plane. A sample examination method is firstly introduced to estimate whether the sample is placed horizontally. The machining parameters include scratching direction, speed, cycles, normal load and feed. According to the experimental results, the scratching depth is significantly affected by the normal load in all four defined scratching directions but is rarely influenced by the scratching speed. The increase of scratching cycle number can increase the scratching depth as well as smooth the groove wall. In addition, the scratching tests of silicon and copper attest that the harder material is easier to be removed. In the scratching with different feed amount, the machining results indicate that the machined depth increases as the feed reduces. Further, a cubic polynomial is used to fit the experimental results to predict the scratching depth. With the selected machining parameters of scratching direction d3/d4, scratching speed 5μm/s and feed 0.06μm, some more micro structures including stair, sinusoidal groove, Chinese character "田", "TJU" and Chinese panda have been fabricated on the silicon substrate.

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Section: Introductionmentioning

confidence: 99%

Experimental investigation of the tip based micro/nano machining

Guo

Tian

Liu

et al. 2017

Applied Surface Science

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“…Micro/nano positioning technology is one of the key enabling methodologies for modern scientific and engineering applications including AFM (Atomic Force Microscopy), STM (Scanning Tunnel Microscopy), optical fiber alignment, bio-micro-surgery, bio-nanotechnology, and micro/nano assembly and manipulation [1][2][3][4][5]. It is well known that the static and dynamic characteristics of the micro/nano positioning mechanisms are mainly dependent on the structure of the mechanism and the performance of the actuator [6].…”

Section: Introductionmentioning

confidence: 99%

Design and control methodology of a 3-DOF flexure-based mechanism for micro/nano-positioning

Guo

Tian

Liu

et al. 2015

Robotics and Computer-Integrated Manufacturing

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2015)Design and control methodology of a 3-DOF flexure-based mechanism for micro/nanopositioning. Copies of full items can be used for personal research or study, educational, or not-forprofit purposes without prior permission or charge. Provided that the authors, title and full bibliographic details are credited, a hyperlink and/or URL is given for the original metadata page and the content is not changed in any way.

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“…force microscopes [6]- [10], and ultra-precision machine tools [11]- [13]. They play a vital role for experimental investigation and manipulation of nanoscale biological [14], chemical [15], material [16], and physical processes [17].…”

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confidence: 99%

Modeling and Control of Piezo-Actuated Nanopositioning Stages: A Survey

Zhu

et al. 2016

IEEE Trans. Automat. Sci. Eng.

502

216

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Piezo-actuated stages have become more and more promising in nanopositioning applications due to the excellent advantages of the fast response time, large mechanical force, and extremely fine resolution. Modeling and control are critical to achieve objectives for high-precision motion. However, piezo-actuated stages themselves suffer from the inherent drawbacks produced by the inherent creep and hysteresis nonlinearities and vibration caused by the lightly damped resonant dynamics, which make modeling and control of such systems challenging. To address these challenges, various techniques have been reported in the literature. This paper surveys and discusses the progresses of different modeling and control approaches for piezo-actuated nanopositioning stages and highlights new opportunities for the extended studies.Note to Practitioners-Piezo-actuated nanopositioning stages featuring fast response, large force, and fine resolution appear poised to play an increasingly important role in fields requiring micro/nano positioning. Such stages, however, exhibit complex piezoelectric behavior, which is often neglected, including: frequency response, nonlinear electric field dependence, creep, aging, and thermal behavior. The presence of such a behavior observed in the stages poses challenges in realizing precise micro/nanopositioning performance. This paper presents an overview of the piezo-actuated nanopositioning stages emphasizing the key role of modeling and control techniques, where high accuracy is important.

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Design and evaluation of a mechanical nanomanufacturing system for nanomilling

Cited by 81 publications

References 30 publications

Experimental investigation of the tip based micro/nano machining

Experimental investigation of the tip based micro/nano machining

Design and control methodology of a 3-DOF flexure-based mechanism for micro/nano-positioning

Modeling and Control of Piezo-Actuated Nanopositioning Stages: A Survey

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