Design and evaluation of a minienvironment for semiconductor manufacture processes

Hu, Shih−Cheng; Chuah, Yew Khoy; Yen, Meng-Shung

doi:10.1016/s0360-1323(00)00095-0

Cited by 49 publications

(16 citation statements)

References 2 publications

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“…Obtaining a high degree of cleanliness in such large volumes using air circulation and ventilation devices results in high operating expenses [1,2]. Therefore, manufacturers are much more interested in mini-environments, which are small spaces designed to deliver a localized clean air flow around sensitive products [3]. To reduce the possibility of contaminants, a mini-environment enclosure has been developed to effectively control residual released time and external airflow.…”

Section: Introductionmentioning

confidence: 99%

Numerical Study on an Airflow Field of a Reticle Stocker with a Moving Crane in a Mini-Environment

Chu

et al. 2017

Atmosphere

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This study numerically investigates the effects of a moving crane and airflow on contaminant removal efficiency of various reticle box coverage sequences in a stocker. The analyzed characteristics of flow patterns are used to protect the reticles from contaminants, without altering their internal component configuration in conjunction with the aim of cost-savings. A finite volume method was applied in a numerical analysis using computational fluid dynamics software, ANSYS Fluent. To simulate actual operating conditions, the effects of inlet velocity of clean air and crane movement speed on contaminant removal efficiency (CRE) are considered, and a particle release technique is analyzed to determine contaminant concentrations in the stocker. The results show that a higher airflow rate leads to a better contaminant removal efficiency in the stocker. For the various arrangements of reticle boxes in the stocker, the symmetric coverage sequence provides the most satisfactory contaminant removal rate. An optimal inlet airflow velocity of 0.12 m/s is obtained based on the CRE distribution. In addition, the airflow distributions indicate that a vortex is induced by the air flow through a solid boundary; thus, a higher inlet airflow velocity results in a small vortex that also benefits the CRE. The results also demonstrate that a high crane movement speed causes a large reverse flow region at the bottom that also induces a long wake behind the crane, into which particles are easily drawn.

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Section: Introductionmentioning

confidence: 99%

Numerical Study on an Airflow Field of a Reticle Stocker with a Moving Crane in a Mini-Environment

Chu

et al. 2017

Atmosphere

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“…The particle contamination to a coating process could be reduced by using a minienvironment, and the reduction in particle concentration was affected by the operating conditions of the door and exhaust of the minienvironment (Chuah, Tsai, & Hu, 2000). A minienvironment was designed to have a buffer zone between the ambient and the process zones, and the buffer zone could effectively protect the process zone from particulate contamination (Hu, Chuah, & Yen, 2002).…”

Section: Introductionmentioning

confidence: 99%

Investigation of particulate contamination of heated wafers contained in a closed environment

Lee

Yook

2015

Journal of Aerosol Science

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“…[5][6][7][8][9][10][11] More specialized uses of air curtains include refrigeration, 12.13 mining, 14 and the food and semiconductor industries. 15,16 In the proposed concept, the EDP is an integral part of a doorway, on top of which is mounted an air curtain. The airflow is received by a floor-mounted receiver.…”

Section: Introductionmentioning

confidence: 99%

Velocity Measurements of Doorway Flow Induced by an Air Curtain

Pierce

Yajin

Chauhan

et al. 2006

25th AIAA Aerodynamic Measurement Technology and Ground Testing Conference

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The airflow induced by an air curtain mounted over a doorway is examined for its potential use in explosive detection portals. A challenge to gaining understanding of such flows is mapping it using particle image velocimetry (PIV), a technique which is usually used in smaller-scale applications and with higher velocity flows. This paper discusses some of the challenges, requirements, techniques, and results of mapping large-scale flows with PIV, in particular, the mapping of a doorway flow induced by an air curtain.

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Design and evaluation of a minienvironment for semiconductor manufacture processes

Cited by 49 publications

References 2 publications

Numerical Study on an Airflow Field of a Reticle Stocker with a Moving Crane in a Mini-Environment

Numerical Study on an Airflow Field of a Reticle Stocker with a Moving Crane in a Mini-Environment

Investigation of particulate contamination of heated wafers contained in a closed environment

Velocity Measurements of Doorway Flow Induced by an Air Curtain

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