Design and evaluation of a primary high-vacuum standard

Jitschin, W.; Jousten, Karl; Wandrey, D

doi:10.1116/1.577823

Cited by 21 publications

(4 citation statements)

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“…For the realization of lower pressures the continuous expansion method is applied [13][14][15]. In this method two largely different orifices are used to generate the low pressure.…”

Section: Primary Standards For Vacuummentioning

confidence: 99%

Traceability to SI units for vacuum measurement in industrial applications

Jousten

2012

Measurement

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“…For the realization of lower pressures the continuous expansion method is applied [13][14][15]. In this method two largely different orifices are used to generate the low pressure.…”

Section: Primary Standards For Vacuummentioning

confidence: 99%

Traceability to SI units for vacuum measurement in industrial applications

Jousten

2012

Measurement

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“…In the medium pressure range 0.1 Pa to 1000 Pa, mercury manometers are not suitable and the characteristics of continuous expansion systems become poorly deˆned, as they depend on pressure, so primary standards are based on static expansion of a gas 25) . That is why, the static expansion systems (also called volume or series expansions systems) are used as primary standards for the calibration of vacuum gauges 26,27) .…”

Section: Static Expansion Systemsmentioning

confidence: 99%

The KRISS Primary Vacuum Gauge Calibration Standards: A Review

Khan¹,

Hong

Satar³

et al. 2016

J. Vac. Soc. Jpn.

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The calibration of vacuum gauges is mainly carried out in two ways; i) using the primary standards in which the readings of a test gauge are compared with the pressures generated by the standard, and ii) by comparison method in which the readings of the gauge under test are compared with the output signal of a secondary standard. The former type of standards are, usually, large and complicated systems comprising of vacuum pumps, chambers, valves, and gauges etc. while the later type are simply vacuum gauges, with superior qualities, which are attached to a properly designed calibration system. The Vacuum Measurement Lab at Korea Research Institute of Standards and Science (KRISS), Rep. of Korea, maintains primary standards as well as systems for calibration by comparison method. The KRISS primary standards can be used for the calibration purpose in the pressure range from ～10-7 Pa to 133 kPa. For bilateral as well as key comparison of these standards, KRISS has participated in the past where its standards have good degree of equivalence and hence international recognition, with other national standards like that of NIST, PTB, NPL(UK), etc. Besides, the KRISS Vacuum Measurement Lab also has comparison system which can be used for calibration by comparison method. However, here the KRISS primary vacuum gauge calibration standards are discussed brie‰y with the aim to provide enough information to the readers in a single paper.

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“…No gas molecules can go in the opposite direction from the pumping chamber as there is zero pressure as a consequence of the infinitely large pumping speed. Thus, inclusion of the finite pumping speed in equation ( 3) obeys the fact that the pumping chamber contains non-zero gas number density of molecules and that gas molecules also impinge on the area of the orifice from this side [4]. However, the gas flowing through the orifice from the calibration chamber to the pumping chamber also contains molecules that (depending on the particular arrangement) pass directly into the inlet of the pump, are pumped out and thus cannot impinge on the orifice from the opposite side.…”

Section: Theorymentioning

confidence: 99%

Determination of pumping speed and its impact on the overall uncertainty budget of the CMI orifice flow standard

et al. 2008

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The pumping speed of a pump in an orifice flow standard was measured to enable calculation of the effective pumping speed in the calibration chamber. The main problems are as follows. (1) The pumping speed of a pump connected to a chamber of finite size is not unambiguously defined; different measuring arrangements lead to different values. It is necessary to measure the pumping speed of the pump in the same arrangement as for the orifice flow standard. (2) If this is to be a primary standard, gauges related to calibration of the gauge to another standard cannot be used for the measurement for the same range of pressures.The necessary precision of the measurement was determined. The orifice method and the flowmeter method were tested directly in the arrangement for the orifice flow standard. These two methods were used to avoid the necessity of using gauges calibrated to another standard.The pumping speed of the pump for the CMI orifice flow standard was measured with sufficiently low uncertainty, so that its effect on the uncertainty budget of the entire standard was negligible.

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Design and evaluation of a primary high-vacuum standard

Cited by 21 publications

References 0 publications

Traceability to SI units for vacuum measurement in industrial applications

Traceability to SI units for vacuum measurement in industrial applications

The KRISS Primary Vacuum Gauge Calibration Standards: A Review

Determination of pumping speed and its impact on the overall uncertainty budget of the CMI orifice flow standard

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