Design and electro-thermal analysis of a platinum micro heater for gas sensors

Bedoui, Souhir; Gomri, Sami; Samet, Hekmet; Kachouri, Abdennaceur

doi:10.1109/ssd.2016.7473712

Cited by 6 publications

(4 citation statements)

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“…In order to address this issue, many groups used microheaters in the devices which maintained constant temperature throughout the working conditions. 27,28 However, such a sensor configuration limited the effective monitoring of oxygen at high temperatures due to high power consumption. The sensor packaging is quite difficult in such devices due to the coupling of output voltage with heater circuit when temperature is maintained above 300 °C.…”

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confidence: 99%

“…Recent studies explored that though TiO 2 based sensor materials are highly sensitive toward oxygen, such materials suffer from high temperature coefficient of resistance (TCR) (i.e., high activation energy). ,− Hence, one of the major challenges faced by resistive oxygen sensing materials is that though such materials show resistivity changes toward oxygen adsorption, they also respond strongly with temperature which hinders their practical usage under temperature fluctuating conditions. In order to address this issue, many groups used microheaters in the devices which maintained constant temperature throughout the working conditions. , However, such a sensor configuration limited the effective monitoring of oxygen at high temperatures due to high power consumption. The sensor packaging is quite difficult in such devices due to the coupling of output voltage with heater circuit when temperature is maintained above 300 °C .…”

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confidence: 99%

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Highly Sensitive, Temperature-Independent Oxygen Gas Sensor Based on Anatase TiO₂ Nanoparticle Grafted, 2D Mixed Valent VO_x Nanoflakelets

2018

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Herein, we report a facile approach for the synthesis of TiO nanoparticles tethered on 2D mixed valent vanadium oxide (VO /TiO) nanoflakelets using a thermal decomposition assisted hydrothermal method and investigation of its temperature-independent performance enhancement in oxygen-sensing properties. The material was structurally characterized using XRD, TEM, Raman, DSC, and XPS analysis. The presence of mixed valent states, such as VO and VO in VO , and the metastable properties of VO have been found to play crucial roles in the temperature-independent electrical conductivity of VO /TiO nanoflakelets. Though pristine VO exhibited characteristic semiconductor-to-metal transition of monoclinic VO, pure VO nanoflakelets exhibited poor sensitivity toward sensing oxygen. VO/TiO nanoflakelets showed a very low temperature coefficient of resistance above 150 °C with improved sensitivity (35 times higher than VO for 100 ppm) toward oxygen gas. VO/TiO nanoflakelets exhibited much higher response, faster adsorption and desorption toward oxygen as compared to pristine VO beyond 100 °C, which endowed the sensor with excellent temperature-independent sensor properties within 150-500 °C. The faster adsorption and desorption after 100 °C led to shorter response time (3-5 s) and recovery time (7-9 s). The results suggest that 2D VO/TiO can be a promising candidate for temperature-independent oxygen sensor applications.

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confidence: 99%

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Highly Sensitive, Temperature-Independent Oxygen Gas Sensor Based on Anatase TiO₂ Nanoparticle Grafted, 2D Mixed Valent VO_x Nanoflakelets

2018

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“…The silicon oxide layer [44] or silicon oxide and silicon nitride bilayer will make up this membrane [45,46]. His function is to thermally insulate between the substrate and the sensitive layer [47]. Then the micro hotplate enables the detection of gaseous substances to exceed high temperatures.…”

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confidence: 99%

Review on Smart Electronic Nose Coupled with Artificial Intelligence for Air Quality Monitoring

Faleh¹,

Bedoui²,

Kachouri³

2020

Adv. sci. technol. eng. syst. j.

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With the advent of the Internet of Things Technologies (IOT), smart homes, and smart city applications, E-Nose was created. Almost of gas sensors consisting the electronic nose system suffer from cross sensitivity and lack of selectivity. Coupling smart gas sensors with artificial intelligence algorithms can thus empower conventional gas sensing technologies and increase accuracy in gas detection. This study describes the overall types of smart gas sensors used in air quality control, signal pre-processing and extraction features. Also it presents pattern recognition methods used in E-nose applications including linear methods such as Linear Discriminant Analysis LDA, K-Nearest Neighbors KNN and Non-linear such as algorithms Support vector Machine SVM and Artificial Neural Network ANN and their impact on improving accuracy rate for gas detection. Finally, this paper summarizes by providing directions for about how to leverage the benefits of combining these classifiers which is known as Data fusion approach and ensemble classifiers.

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“…Microheater material.-Different materials have been used for the microheater, including silicon carbide (SiC), 90 polysilicon, 91,92 molybdenum, 93,94 platinum, 95 and tungsten. 96 The membrane, which surrounds the microheater, is usually comprised of some combination of silicon dioxide (SiO 2 ) and silicon nitride (Si 3 N 4 ).…”

Section: Microheater Designmentioning

confidence: 99%

Review—System-on-Chip SMO Gas Sensor Integration in Advanced CMOS Technology

Filipovic

Lahlalia

2018

J. Electrochem. Soc.

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The growing demand for the integration of functionalities on a single device is peaking with the rise of IoT. We are near to having multiple sensors in portable and wearable technologies, made possible through integration of sensor fabrication with mature CMOS manufacturing. In this paper we address semiconductor metal oxide sensors, which have the potential to become a universal sensor since they can be used in many emerging applications. This review concentrates on the gas sensing capabilities of the sensor and summarizes achievements in modeling relevant materials and processes for these emerging devices. Recent advances in sensor fabrication and the modeling thereof are further discussed, followed by a description of the essential electro-thermal-mechanical analyses, employed to estimate the devices' mechanical reliability. We further address advances made in understanding the sensing layer, which can be modeled similar to a transistor, where instead of a gate contact, the ionosorped gas ions create a surface potential, changing the film's conduction. Due to the intricate nature of the porous sensing films and the reception-transduction mechanism, many added complexities must be addressed. The importance of a thorough understanding of the electro-thermal-mechanical problem and how it links to the operation of the sensing film is thereby highlighted.

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Design and electro-thermal analysis of a platinum micro heater for gas sensors

Cited by 6 publications

References 3 publications

Highly Sensitive, Temperature-Independent Oxygen Gas Sensor Based on Anatase TiO₂ Nanoparticle Grafted, 2D Mixed Valent VO_x Nanoflakelets

Highly Sensitive, Temperature-Independent Oxygen Gas Sensor Based on Anatase TiO₂ Nanoparticle Grafted, 2D Mixed Valent VO_x Nanoflakelets

Review on Smart Electronic Nose Coupled with Artificial Intelligence for Air Quality Monitoring

Review—System-on-Chip SMO Gas Sensor Integration in Advanced CMOS Technology

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Design and electro-thermal analysis of a platinum micro heater for gas sensors

Cited by 6 publications

References 3 publications

Highly Sensitive, Temperature-Independent Oxygen Gas Sensor Based on Anatase TiO2 Nanoparticle Grafted, 2D Mixed Valent VOx Nanoflakelets

Highly Sensitive, Temperature-Independent Oxygen Gas Sensor Based on Anatase TiO2 Nanoparticle Grafted, 2D Mixed Valent VOx Nanoflakelets

Review on Smart Electronic Nose Coupled with Artificial Intelligence for Air Quality Monitoring

Review—System-on-Chip SMO Gas Sensor Integration in Advanced CMOS Technology

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Highly Sensitive, Temperature-Independent Oxygen Gas Sensor Based on Anatase TiO₂ Nanoparticle Grafted, 2D Mixed Valent VO_x Nanoflakelets

Highly Sensitive, Temperature-Independent Oxygen Gas Sensor Based on Anatase TiO₂ Nanoparticle Grafted, 2D Mixed Valent VO_x Nanoflakelets