2006
DOI: 10.1117/12.692774
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Design and development of high quantum efficiency large area UV focal plane arrays for photon counting applications

Abstract: In this paper we will present innovative design approach for UV Focal Plane Array for Photon Counting Applications. This Focal Plane includes the building a large area silicon micro-channel plate (MCP) using GaN photocathode. In this paper, we will present the design and simulation of silicon micro-channel plate with GaN photocathode with large area array with 2 micron pores and 3 micron pitch. We will also present results for the ICP-RIE process to fabricate 2 micron pores, and Growth of high conductivity GaN… Show more

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Cited by 1 publication
(2 citation statements)
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“…So, they are strongly demanded in UV commnication, UV spectroscopy and other low-light-level UV-imaging applications. The struture of UV image intensifier tubes with GaN photocathode is shown in Figure 1 4 . In electron beam lithography and microscopy there is a pressing need for photocathode that exhibits high quantum efficiency and long lifetime.…”
Section: Introductionmentioning
confidence: 99%
See 1 more Smart Citation
“…So, they are strongly demanded in UV commnication, UV spectroscopy and other low-light-level UV-imaging applications. The struture of UV image intensifier tubes with GaN photocathode is shown in Figure 1 4 . In electron beam lithography and microscopy there is a pressing need for photocathode that exhibits high quantum efficiency and long lifetime.…”
Section: Introductionmentioning
confidence: 99%
“…Gallium Nitride (GaN) photocathodes have extensive application from defence, to industrial, to astronomical [1][2][3][4][5][6][7][8][9][10][11] . UV image intensifier tubes with GaN photocathode have higher quantum efficiency, lower dark current, sharper wavelength cut-off response and other characteristics such as solar blind.…”
Section: Introductionmentioning
confidence: 99%