Abstract:In this paper, the design and development of an electrostatically actuated microelectromechanical systems (MEMS) device for the tensile test of Si nanowires (NWs) are described. The device is composed of a comb-drive electrostatic actuator for generating uniaxial tensile force, capacitive sensors for measuring tensile force and displacement, an electrothermal actuator with a ratchet for clamping and releasing a sample stage, and a force calibration mechanism. The resolution of the tensile elongation measuremen… Show more
Set email alert for when this publication receives citations?
scite is a Brooklyn-based organization that helps researchers better discover and understand research articles through Smart Citations–citations that display the context of the citation and describe whether the article provides supporting or contrasting evidence. scite is used by students and researchers from around the world and is funded in part by the National Science Foundation and the National Institute on Drug Abuse of the National Institutes of Health.