Design and Development of a Dual-Axis Force Sensing MEMS Microgripper

Yang, Sijie; Xu, Qingsong; Nan, Zhijie

doi:10.1115/1.4038010

Cited by 21 publications

(5 citation statements)

References 21 publications

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“…The disadvantage was that inadequate data obtained owing to the limited numbers of sensors. S. Yang put forth a microelectromechanical systems (MEMS) microgripper, [177] which integrated an electrostatic actuator and a capacitive force sensor. This gripper could detect two perpendicular forces by a single sensor with a resolution of 0.58lN within the force range of 698.27 lN.…”

Section: Force Sensingmentioning

confidence: 99%

Recent Progress in Advanced Tactile Sensing Technologies for Soft Grippers

Qu,

Mao,

et al. 2023

Adv Funct Materials

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Tactile sensing technology is crucial for soft grippers. Soft grippers equipped with intelligent tactile sensing systems based on various sensors can interact safely with the unstructured environments and obtain precise properties of objects (e.g., size and shape). It is essential to develop state‐of‐the‐art sensing technologies for soft grippers to handle different grasping tasks. In this review, the development of tactile sensing techniques for robotic hands is first introduced. Then, the principles and structures of different types of sensors normally adopted in soft grippers, including capacitive tactile sensors, piezoresistive tactile sensors, piezoelectric tactile sensors, fiber Bragg grating (FBG) sensors, vision‐based tactile sensors, triboelectric tactile sensors, and other advanced sensors developed recently are briefly presented. Furthermore, sensing modalities and methodologies for soft grippers are also described in aspects of force measurement, perception of object properties, slip detection, and fusion of perception. The application scenarios of soft grippers are also summarized based on these advanced sensing technologies. Finally, the challenges of tactile sensing technologies for soft grippers that need to be tackled are discussed and perspectives in addressing these challenges are pointed out.

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Section: Force Sensingmentioning

confidence: 99%

Recent Progress in Advanced Tactile Sensing Technologies for Soft Grippers

Qu,

Mao,

et al. 2023

Adv Funct Materials

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“…2. In [17], an electrostatic comb structure is combined with a ×2.8 lever, achieving 60 µm of displacement at 80 V by a 5.5 mm × 6.0 mm microgripper. A simple ×3 seesaw leverage MEMS structure has also been used for configurable capacitors, demonstrating a 0.15 pF -0.5 pF capacitance range from a 0 -15 V actuation voltage [18].…”

Section: Direct Leveragementioning

confidence: 99%

Micro Motion Amplification–A Review

et al. 2020

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Many motion-active materials have recently emerged, with new methods of integration into actuator components and systems-on-chip. Along with established microprocessors, interconnectivity capabilities and emerging powering methods, they offer a unique opportunity for the development of interactive millimeter and micrometer scale systems with combined sensing and actuating capabilities. The amplification of nanoscale material motion to a functional range is a key requirement for motion interaction and practical applications, including medical micro-robotics, micro-vehicles and micro-motion energy harvesting. Motion amplification concepts include various types of leverage, flextensional mechanisms, unimorphs, micro-walking / micro-motor systems, and structural resonance. A review of the research stateof-art and product availability shows that the available mechanisms offer a motion gain in the range of 10. The limiting factor is the aspect ratio of the moving structure that is achievable in the microscale. Flexures offer high gains because they allow the application of input displacement in the close vicinity of an effective pivotal point. They also involve simple and monolithic fabrication methods allowing combination of multiple amplification stages. Currently, commercially available motion amplifiers can provide strokes as high as 2% of their size. The combination of high-force piezoelectric stacks or unimorph beams with compliant structure optimization methods is expected to make available a new class of high-performance motion translators for microsystems.

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“…In comparison to traditional parallel mechanisms, CPM realizes motion by elastic deformation of flexure parts, which by nature have no friction, backlash, or wear. Owing to these advantages, CPM has been widely employed in micro-electromechanical systems [1], precise positioning [2], micromanipulation [3], optical alignment [4], and other applications. Kinematic model is the basis of the motion control for the parallel mechanism.…”

Section: Introductionmentioning

confidence: 99%

An Inverse Kinematic Model for the 3-PRS Compliant Parallel Mechanism With Forward Causative Force

Wei,

Bi,

Yao

et al. 2023

IEEE Access

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The inverse kinematic model is an essential mathematical tool of the performance analysis and motion control for the parallel mechanism. A diversity of mathematical methods is used for inverse kinematic modelling. However, the direction of the causative force in the model is disregarded, which leads to large deviation due to the force sensitivity of the flexure hinge. This paper presents an approach of the inverse kinematic model for a 3-PRS compliant parallel mechanism with forward causative force that is coincided with the forward kinematic model situation. Compliant matrix method is adopted to analyze the deformation of the flexure hinge. The prismatic joint is substituted by a flexure element with infinite flexibility to construct a close-loop kinematic chain. Compared with the traditional inverse kinematic model, the proposed one has a lesser deviation in comparison with the forward kinematics model. The finite element analysis model of the 3-PRS mechanism is developed. The simulation results validate the effectiveness of the proposed methodology that can be employed and extended to a variety of compliant parallel mechanism.

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Design and Development of a Dual-Axis Force Sensing MEMS Microgripper

Cited by 21 publications

References 21 publications

Recent Progress in Advanced Tactile Sensing Technologies for Soft Grippers

Recent Progress in Advanced Tactile Sensing Technologies for Soft Grippers

Micro Motion Amplification–A Review

An Inverse Kinematic Model for the 3-PRS Compliant Parallel Mechanism With Forward Causative Force

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