Design and Development of a MOEMS Accelerometer Using SOI Technology

Mireles, José; Sauceda, Angel; Pérez, Abimael Jiménez; Ramos, Manuel; González-Landaeta, Rafael

doi:10.3390/mi14010231

Cited by 9 publications

(5 citation statements)

References 29 publications

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“…The experiments have shown that the intrinsic noise of the MOEM accelerometer did not exceed 15 ng/ √ Hz at 1 Hz. Mireles et al [25] described the design, manufacturing and testing of a MOEM accelerometer consisting of a structure mounted in a fixed substrate on a spring suspension and a sensing system based on a Fabry-Pérot interferometer. The accelerometer implemented a custom-designed spring suspension for the proof mass.…”

Section: Introductionmentioning

confidence: 99%

The Design, Modeling and Experimental Investigation of a Micro-G Microoptoelectromechanical Accelerometer with an Optical Tunneling Measuring Transducer

Barbin,

Nesterenko,

Koleda

et al. 2024

Sensors

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This treatise studies a microoptoelectromechanical accelerometer (MOEMA) with an optical measuring transducer built according to the optical tunneling principle (evanescent coupling). The work discusses the design of the accelerometer’s microelectromechanical sensing element (MSE) and states the requirements for the design to achieve a sensitivity threshold of 1 µg m/s2 at a calculated eigenvalue of the MSE. The studies cover the selection of the dimensions, mass, eigenfrequency and corresponding stiffness of the spring suspension, gravity-induced cross-displacements. The authors propose and experimentally test an optical transducer positioning system represented by a capacitive actuator. This approach allows avoiding the restrictions in the fabrication of the transducer conditioned by the extremely high aspect ratio of deep silicon etching (more than 100). The designed MOEMA is tested on three manufactured prototypes. The experiments show that the sensitivity threshold of the accelerometers is 2 µg. For the dynamic range from minus 0.01 g to plus 0.01 g, the average nonlinearity of the accelerometers’ characteristics ranges from 0.7% to 1.62%. For the maximum dynamic range from minus 0.015 g to plus 0.05 g, the nonlinearity ranges from 2.34% to 2.9%, having the maximum deviation at the edges of the regions. The power gain of the three prototypes of accelerometers varies from 12.321 mW/g to 26.472 mW/g. The results provide broad prospects for the application of the proposed solutions in integrated inertial devices.

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Section: Introductionmentioning

confidence: 99%

The Design, Modeling and Experimental Investigation of a Micro-G Microoptoelectromechanical Accelerometer with an Optical Tunneling Measuring Transducer

Barbin,

Nesterenko,

Koleda

et al. 2024

Sensors

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“…In the wave-optics-based accelerometers, the acceleration alters the parameters of the light flux (phase, frequency, intensity, etc.). MOEM-accelerometers based on wave optics are tunnel, grating or interferometric resonators [22][23][24], Fabry-Perot resonators [25][26][27][28], photon crystals [29][30][31] and others. At present, MOEM-accelerometers based on the fiber Bragg grating (FBG) with direct integration into optical fiber are widely used [32][33][34][35].…”

Section: Introductionmentioning

confidence: 99%

An Optical Measuring Transducer for a Micro-Opto-Electro-Mechanical Micro-g Accelerometer Based on the Optical Tunneling Effect

et al. 2023

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Micro-opto-electro-mechanical (MOEM) accelerometers that can measure small accelerations are attracting growing attention thanks to their considerable advantages—such as high sensitivity and immunity to electromagnetic noise—over their rivals. In this treatise, we analyze 12 schemes of MOEM-accelerometers, which include a spring mass and a tunneling-effect-based optical sensing system containing an optical directional coupler consisting of a fixed and a movable waveguide separated by an air gap. The movable waveguide can perform linear and angular movement. In addition, the waveguides can lie in single or different planes. Under acceleration, the schemes feature the following changes to the optical system: gap, coupling length, overlapping area between the movable and fixed waveguides. The schemes with altering coupling lengths feature the lowest sensitivity, yet possess a virtually unlimited dynamic range, which makes them comparable to capacitive transducers. The sensitivity of the scheme depends on the coupling length and amounts to 11.25 × 103 m−1 for a coupling length of 44 μm and 30 × 103 m−1 for a coupling length of 15 μm. The schemes with changing overlapping areas possess moderate sensitivity (1.25 × 106 m−1). The highest sensitivity (above 6.25 × 106 m−1) belongs to the schemes with an altering gap between the waveguides.

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“…It requires that the vibration pickup should have a small enough mass to approach neutral buoyancy and resonate with the water medium to pick up underwater vibration signals. In 2023, Mireles, J. et al [ 8 ] developed a MOEMS accelerometer using SOI technology, which contains a mass structure and handle layers coupled with four designed springs built. The sensor exhibited a resonant frequency of 1274 Hz under running conditions up to 7 g. However, the sensitivity of the low-frequency response is lower, as the sensitivity is reduced by 6 dB for each doubling of the frequency.…”

Section: Introductionmentioning

confidence: 99%

“…The accelerometer exhibited a sensitivity of 16.8 mV/g at 200 Hz. According to the above research, the four-cantilever beam structure has advantages, such as high sensitivity, wide frequency range, improved linearity, low power consumption, and easy fabrication, making it a popular choice for piezoelectric accelerometers used in various applications [ 8 ].…”

Section: Introductionmentioning

confidence: 99%

High-Sensitivity Piezoelectric MEMS Accelerometer for Vector Hydrophones

Shi

Kang

et al. 2023

Micromachines

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In response to the growing demand for high-sensitivity accelerometers in vector hydrophones, a piezoelectric MEMS accelerometer (PMA) was proposed, which has a four-cantilever beam integrated inertial mass unit structure, with the advantages of being lightweight and highly sensitive. A theoretical energy harvesting model was established for the piezoelectric cantilever beam, and the geometric dimensions and structure of the microdevice were optimized to meet the vibration pickup conditions. The sol-gel and annealing technology was employed to prepare high-quality PZT thin films on silicon substrate, and accelerometer microdevices were manufactured by using MEMS technology. Furthermore, the MEMS accelerometer was packaged for testing on a vibration measuring platform. Test results show that the PMA has a resonant frequency of 2300 Hz. In addition, there is a good linear relationship between the input acceleration and the output voltage, with V = 8.412a − 0.212. The PMA not only has high sensitivity, but also has outstanding anti-interference ability. The accelerometer structure was integrated into a vector hydrophone for testing in a calibration system. The results show that the piezoelectric vector hydrophone (PVH) has a sensitivity of –178.99 dB@1000 Hz (0 dB = 1 V/μPa) and a bandwidth of 20~1100 Hz. Meanwhile, it exhibits a good “8” shape directivity and consistency of each channel. These results demonstrate that the piezoelectric MEMS accelerometer has excellent capabilities suitable for use in vector hydrophones.

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Design and Development of a MOEMS Accelerometer Using SOI Technology

Cited by 9 publications

References 29 publications

The Design, Modeling and Experimental Investigation of a Micro-G Microoptoelectromechanical Accelerometer with an Optical Tunneling Measuring Transducer

The Design, Modeling and Experimental Investigation of a Micro-G Microoptoelectromechanical Accelerometer with an Optical Tunneling Measuring Transducer

An Optical Measuring Transducer for a Micro-Opto-Electro-Mechanical Micro-g Accelerometer Based on the Optical Tunneling Effect

High-Sensitivity Piezoelectric MEMS Accelerometer for Vector Hydrophones

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