Design and control of a multi-DOF micromanipulator dedicated to multiscale micromanipulation

Abstract

This paper presents the design, implementation and control of a new piezoelectrically actuated compliant micromanipulator dedicated to multiscale, precision and reliable operations. To begin with, the manipulator is devised to obtain multi degrees of freedom and large workspace ranges. Two-stage amplification mechanisms (consists of the leverage and the rocker mechanisms) and composite parallelogram mechanisms are combined to construct the lower microstage. Meanwhile, the structure design of the upper dual-driven microgripper is based on the bridge-type mechanism and the unilateral parallelogram mechanism. Through finite-element analysis, the structural parameters of the micromanipulator are optimized and the structural interaction performances are examined. Moreover, a cooperative control strategy is proposed to achieve the synchronous control of the motion trajectory, the gripper position and the contact force. Precision motion control in terms of the hysteresis phenomenon and system disturbances is ensured by using an adaptive sliding mode control (SMC). In particular, an improved nonsymmetrical Bouc–Wen model and a fuzzy regulator are proposed in the SMC. Several experimental investigations are conducted to validate the effectiveness of the developed micromanipulator by performing transferring operations of a micro-object. Experimental results demonstrate that the micromanipulator presents good characteristics, and precision and robust operation can be acquired using the cooperative controller.

A survey of Bouc-Wen hysteretic models applied to piezo-actuated mechanical systems: Modeling, identification, and control

“…Yang et al (2016a, 2016b) utilized robust model reference adaptive control combined with a hysteresis observer based on the asymmetric BW model as a feedforward compensation to improve the positioning accuracy of the micro-positioning stage. Yang et al (2017) proposed a fuzzy sliding mode control with an asymmetric BW model to regulate the output of the microstage. Xiao and Li (2014) established a rate-dependent BW model by input voltage dissociation of the PA and utilized an H ∞ controller for system accuracy.…”

A Review of Application and Development Trends in Ultrasonic Motors

“…nanomachining. [40][41][42][43][44][45] It is necessary to have the characteristics of compact structure, positioning accuracy, a high response speed, and a large travel range. Compared to other forms of piezoelectric actuators, ultrasonic motors are one of the ideal controllers for realizing precise motion levels with stable long strokes.…”

Dynamic Modeling and Attitude Decoupling Control for a 3-DOF Flexible Piezoelectric Nano-Positioning Stage Based on ADRC

“…In particular, many researchers have made great contributions to the design and application of flexure-based micro/nano-motion systems, which directly or indirectly promotes the rapid and successful development of precision engineering applications [ 5 , 6 ]. For example, the piezoelectrically actuated nano-positioning stage was designed and implemented in the hope of obtaining better characteristics [ 7 , 8 ]. Meanwhile, a novel 3-DOF stage with constant-force compliant parallel mechanisms can realize the decoupled constant-force motion requirements in three motion directions [ 9 ], as well as the 2-DOF constant-force compliant mechanism gripper [ 10 ].…”