Design and construction of a 2.45 GHz waveguide-based microwave plasma jet at atmospheric pressure for material processing

Al-Shamma’a, Ahmed; Wylie, Stephen R.; Lucas, J.; Pau, Chin Fong

doi:10.1088/0022-3727/34/18/304

Cited by 62 publications

(38 citation statements)

References 12 publications

(11 reference statements)

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“…High electron density ͑over 10 14 cm −3 ͒, moderate neutral temperature ͑a few thousand K͒, and relatively low electron temperature ͑1-2 eV͒ are typical characteristics of the atmospheric pressure microwave plasmas. [1][2][3][4][5] From the application point of view, such characteristics are favorable to atomic spectrometry, decomposition of toxic gases like perfluorocarbon gas, and thermally resistible material processing. [5][6][7] In our previous report in which parameters of the plasma produced in a simple single dielectric tube were measured by optical emission methods, 4 the gas flow rate was one of the important conditions along with the microwave power.…”

Section: Introductionmentioning

confidence: 99%

Parametric study of atmospheric pressure microwave-induced Ar∕O2 plasmas and the ambient air effect on the plasma

Moon

Choe

2006

Physics of Plasmas

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A torch type microwave-induced afterglow plasma was produced at atmospheric pressure using an open-ended fused silica concentric double tube assisted by Ar and O 2 supply gases. The plasma emerged from the end of the discharge tube and was exposed to ambient air. A parametric study of the plasma characteristics was performed by measuring the temperature, density, and plasma volume as the operational parameters such as microwave power, gas flow rate, and its composition were varied. The excitation temperature ͑T exc ͒ obtained from the Ar I emission spectrum ranged from 3010 to 4350 K and the rotational temperature ͑T rot ͒ measured from the OH and O 2 diatomic molecular spectra ranged from 2250 to 3550 K. The electron density ͑n e ͒ from the H ␤ Stark broadening width at the plasma core was in the range of 6.6 to 7.6ϫ 10 14 cm −3 . The two-dimensional distribution of T exc and T rot was also obtained. Experiments while varying the Ar and O 2 gas flow rate and the O 2 / Ar ratio showed that n e was reduced but T exc was increased as the O 2 flow rate was increased. Using an additional dielectric tube for shielding the plasma from the ambient air demonstrated a significantly enlarged plasma length and lower T rot due to the nitrogen entrainment, as compared to the unshielded case.

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Section: Introductionmentioning

confidence: 99%

Parametric study of atmospheric pressure microwave-induced Ar∕O2 plasmas and the ambient air effect on the plasma

Moon

Choe

2006

Physics of Plasmas

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show abstract

“…The nozzle position from the waveguide cavity short circuit wall is 45 mm, nozzle tip diameter is 2 mm, nozzle hole is 0.5 mm, the distance between substrate and nozzle(s) is 20 mm and cavity hole is 20 mm in diameter. This diameter has been optimized to prevent the electrical field from breaking down inside the cavity and also to stop the jet reflected back into the cavity [15]. And the source gases used were hydrogen and liquid compounds (SiCl 4 ).…”

Section: Methodsmentioning

confidence: 99%