Design and Characterization of an Aluminum Nitride-Based MEMS Hydrophone With Biologically Honeycomb Architecture

Jia, Licheng; Shi, Lei; Liu, Chongbin; Yao, Yunxin; Sun, Chengliang; Wu, Guoqiang

doi:10.1109/ted.2021.3093020

Cited by 36 publications

(14 citation statements)

References 24 publications

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“…Capacitive MEMS microphones dominate the market with their high signal-noise ratio (SNR) performance and mature manufacturing process [ 29 ]. The main structure of the capacitive MEMS microphone is a capacitor made up of a rigid backplate and a flexible diaphragm.…”

Section: Mems Acoustic Transducermentioning

confidence: 99%

Acoustic Wake-Up Technology for Microsystems: A Review

Yang

Zhao

2023

Micromachines

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Microsystems with capabilities of acoustic signal perception and recognition are widely used in unattended monitoring applications. In order to realize long-term and large-scale monitoring, microsystems with ultra-low power consumption are always required. Acoustic wake-up is one of the solutions to effectively reduce the power consumption of microsystems, especially for monitoring sparse events. This paper presents a review of acoustic wake-up technologies for microsystems. Acoustic sensing, acoustic recognition, and system working mode switching are the basis for constructing acoustic wake-up microsystems. First, state-of-the-art MEMS acoustic transducers suitable for acoustic wake-up microsystems are investigated, including MEMS microphones, MEMS hydrophones, and MEMS acoustic switches. Acoustic transducers with low power consumption, high sensitivity, low noise, and small size are attributes needed by the acoustic wake-up microsystem. Next, acoustic features and acoustic classification algorithms for target and event recognition are studied and summarized. More acoustic features and more computation are generally required to achieve better recognition performance while consuming more power. After that, four different system wake-up architectures are summarized. Acoustic wake-up microsystems with absolutely zero power consumption in sleep mode can be realized in the architecture of zero-power recognition and zero-power sleep. Applications of acoustic wake-up microsystems are then elaborated, which are closely related to scientific research and our daily life. Finally, challenges and future research directions of acoustic wake-up microsystems are elaborated. With breakthroughs in software and hardware technologies, acoustic wake-up microsystems can be deployed for ultra-long-term and ultra-large-scale use in various fields, and play important roles in the Internet of Things.

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Section: Mems Acoustic Transducermentioning

confidence: 99%

Acoustic Wake-Up Technology for Microsystems: A Review

Yang

Zhao

2023

Micromachines

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“…The performance of the PMUT is related to the material of the piezoelectric layer [ 24 ]. The sensitivity of the hydrophone is proportional to the e 31 f / ε of the piezoelectric material [ 34 , 35 , 36 ], and the commonly used piezoelectric materials in PMUTs include the lead zirconium titanate (PZT), zinc oxide (ZnO) and aluminum nitride (AlN), whose e 31 f / ε are −0.0083, −0.231 and −0.093 respectively. AlN is chosen for the hydrophone in this study because it has good reception characteristics and is compatible with CMOS technology.…”

Section: The Design Of the Mems Hydrophonementioning

confidence: 99%

“…The acoustic matching layer is mainly used to match the impedance of the water and reduce the energy loss caused by the reflection of the acoustic signal. The transmission coefficient of sound [ 35 ] at the interface of the two media can be expressed as Equation (4),

where Z 1 and Z 2 are the acoustic impedance of the two media of propagation. For the proposed hydrophone, Z 1 is the water, and Z 2 is the acoustic matching adhesive.…”

Section: The Design Of the Mems Hydrophonementioning

confidence: 99%

“…Among the studies for hydroacoustic monitoring, Xu et al proposed a hydrophone based on a PMUT with a resonant frequency of 1.086 MHz, and the sensitivity of the hydrophone was measured to be −182.5 dB [ 34 ]. Jia et al proposed a hydrophone based on a honeycomb architecture PMUT with a resonant frequency of 0.96 MHz, and the sensitivity of the hydrophone measured to be −178 dB [ 35 ]. However, the sensitivity of these MEMS hydrophones does not meet the needs of long-distance pipeline monitoring.…”

Section: Introductionmentioning

confidence: 99%

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A High Sensitivity AlN-Based MEMS Hydrophone for Pipeline Leak Monitoring

Zhi

Chen

et al. 2023

Micromachines

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In this work, a miniaturized, low-cost, low-power and high-sensitivity AlN-based micro-electro-mechanical system (MEMS) hydrophone is proposed for monitoring water pipeline leaks. The proposed MEMS Hydrophone consists of a piezoelectric micromachined ultrasonic transducer (PMUT) array, an acoustic matching layer and a pre-amplifier amplifier circuit. The array has 4 (2 × 2) PMUT elements with a first-order resonant frequency of 41.58 kHz. Due to impedance matching of the acoustic matching layer and the 40 dB gain of the pre-amplifier amplifier circuit, the packaged MEMS Hydrophone has a high sound pressure sensitivity of −170 ± 2 dB (re: 1 V/μPa). The performance with respect to detecting pipeline leaks and locating leak points is demonstrated on a 31 m stainless leaking pipeline platform. The standard deviation (STD) of the hydroacoustic signal and Monitoring Index Efficiency (MIE) are extracted as features of the pipeline leak. A random forest model is trained for accurately classifying the leak and no-leak cases using the above features, and the accuracy of the model is about 97.69%. The cross-correlation method is used to locate the leak point, and the localization relative error is about 10.84% for a small leak of 12 L/min.

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“…108,109 Hydrophones are used to obtain scalar or vector information of the underwater acoustic field. Currently, microelectro-mechanical system (MEMS) hydrophones, 110 piezoelectric/ piezoresistive hydrophones, 111 fibre-optic hydrophones 112 and vector hydrophones are widely used. 113 Various new sensing mechanisms have emerged.…”

Section: Hydrophone Monitoring Systemmentioning

confidence: 99%

Recent advances in acoustic technology for aquaculture: A review

Wang

et al. 2023

Reviews in Aquaculture

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Acoustic technology has great application prospects in aquaculture. In particular, two indispensable, critical technologies for the future aquaculture industry are multi‐sensor acquisition that can achieve multi‐scale information fusion, collection and establishment of a global acoustic fish database and highly developed deep learning intelligent algorithms that can establish a correlation mechanism between fish acoustic and behaviour characteristics. Acoustic technology offers remarkable advantages in large and turbid water bodies for studying spatial and temporal distribution patterns of aquatic organism populations, developing on‐demand feeding systems and estimating biomass. This article reviews the development of acoustic technology and its application in aquaculture over the last 30 years. It further analyses, in detail, the advantages and disadvantages of acoustic technology in evaluating aquatic organism biomass and morphological and physical indicators, aquatic organism behaviour and welfare improvement. Challenges of acoustic technology in acquiring dynamic target data accurately, building a global acoustic fish database and establishing connections between fish behaviour and acoustic characteristics are also discussed. In brief, this article aims to help researchers and practitioners better understand the current state‐of‐the‐art acoustic technologies, which can provide strong support for smart aquaculture applications.

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Design and Characterization of an Aluminum Nitride-Based MEMS Hydrophone With Biologically Honeycomb Architecture

Cited by 36 publications

References 24 publications

Acoustic Wake-Up Technology for Microsystems: A Review

Acoustic Wake-Up Technology for Microsystems: A Review

A High Sensitivity AlN-Based MEMS Hydrophone for Pipeline Leak Monitoring

Recent advances in acoustic technology for aquaculture: A review

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