Design and Characterization of a SAW Pressure Sensor on ST Quartz Using a Multiphysic Model

Martinez, Sergio Mora; Vera, John Edwin; Molina, Ferney Beltran; Chaverra, Julio Florez

doi:10.1109/intercon52678.2021.9532734

Cited by 3 publications

(2 citation statements)

References 9 publications

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“…According to the characteristic whereby the Rayleigh wave can only propagate on the surface of the medium, and its energy is constrained to within 1-2λ and decays rapidly with depth [28], in the double-layer substrate structure, we set the thickness of the piezoelectric layer to 0.6λ to ensure that the acoustic wave could penetrate normally to the lower layer. Additionally, the non-piezoelectric layer was set to 2λ, and a Perfectly Matched Layer (PML) with a thickness of 1λ was set at the bottom to absorb SAW and prevent reflection from affecting the simulation results [40]. Although the distribution of metal dot arrays along the acoustic wave propagation path has been shown to effectively enhance the Coriolis force [25,41], in SAW angular velocity sensors, the size of the metal dot array in terms of length, width, and thickness changes the proportions of the elastic wave energy in the metal dot array, as roughly shown in Figure 3, and the optimal size of the metal dot array varies with the material [26].…”

Section: Modelingmentioning

confidence: 99%

Research on the SAW Gyroscopic Effect in a Double-Layer Substrate Structure Incorporating Non-Piezoelectric Materials

Chen,

Meng,

et al. 2023

Micromachines

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The SAW (surface acoustic wave) gyroscopic effect is a key parameter that reflects the sensitivity performance of SAW angular velocity sensors. This study found that adding a layer of non-piezoelectric material with a lower reflection coefficient than that of the upper-layer material below the piezoelectric substrate to form a double-layer structure significantly enhanced the SAW gyroscopic effect, and the smaller the reflection coefficient of the lower-layer material, the stronger the SAW gyroscopic effect, with values being reached that were two to three times those with single-layer substrate structures. This was confirmed using a three-dimensional model, and the experimental results also showed that the thickness of the piezoelectric layer and the type of the lower-layer material also had a significant impact on the SAW gyroscopic effect. This novel discovery will pave the way for the future development of SAW angular velocity sensors.

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Section: Modelingmentioning

confidence: 99%

Research on the SAW Gyroscopic Effect in a Double-Layer Substrate Structure Incorporating Non-Piezoelectric Materials

Chen,

Meng,

et al. 2023

Micromachines

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“…Meanwhile, the Rayleigh wave mainly concentrates within the range of 1~2 wavelengths on the surface of the piezoelectric substrate and attenuates rapidly along the depth [36]. Therefore, it is sufficient to set the model height to three wavelengths and then set a PML layer with a thickness of one wavelength to eliminate reflections [37]. Although previous research have shown that the thickness of the metal dot array increase, the SAW gyroscopic effect will be stronger, but we can only set the thickness of metal dot to 0.9 um due to the technological limitations.…”

Section: Modelingmentioning

confidence: 99%

Finite Element Analysis of the Distribution Parameters of a Metal Dot Array in a SAW Gyroscope

et al. 2022

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A surface acoustic wave (SAW) gyroscope has many unique advantages, but a low detection sensitivity limits its development. Previous studies have shown that adding a metal dot array to the acoustic wave propagation path of the SAW delay line can enhance the Coriolis force and further improve sensitivity. Therefore, in order to optimize the detection sensitivity performance of the sensor, 128°YX-LiNbO3, ST-X Quartz and X112°Y-LiTaO3 piezoelectric substrates were selected by finite element method to analyze the influence of the metal dot array size on the SAW gyroscopic effect in this paper. The most suitable metal dot size for 128°YX-LiNbO3 and X112°Y-LiTaO3 obtained by simulation are 5/16λ and 1/16λ, respectively; for example, when the normalized angular velocity is 1 × 10−3, the SAW gyroscopic effect factor g of the two piezoelectric substrates distributing the optimum size metal dots can reach 22.4 kHz and 5.2 kHz. For ST-X quartz, there is a threshold between the rotation speed of the substrate and the optimum size of the metal dot. When the rotating speed is lower than the threshold, the SAW gyroscopic effect is strongest when the metal dot size is 3/16λ; otherwise, the SAW gyroscopic effect is strongest when the size is 11/16λ. These research results provide new ideas for improvement of the SAW gyroscope.

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A Masterpiece of Superior Crystals: Quartz Resonant Pressure Sensor—A Review

Zhang,

Yao

et al. 2024

IEEE Sensors J.

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Design and Characterization of a SAW Pressure Sensor on ST Quartz Using a Multiphysic Model

Cited by 3 publications

References 9 publications

Research on the SAW Gyroscopic Effect in a Double-Layer Substrate Structure Incorporating Non-Piezoelectric Materials

Research on the SAW Gyroscopic Effect in a Double-Layer Substrate Structure Incorporating Non-Piezoelectric Materials

Finite Element Analysis of the Distribution Parameters of a Metal Dot Array in a SAW Gyroscope

A Masterpiece of Superior Crystals: Quartz Resonant Pressure Sensor—A Review

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