Design and characterization of a low-profile micropositioning stage

Yang, Renyi; Jouaneh, Musa; Schweizer, R.

doi:10.1016/0141-6359(95)00032-1

Cited by 100 publications

(42 citation statements)

References 4 publications

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“…특히 나노 분야에 이용되는 계측 시스템의 경우, 위치 결정용 초정밀 스테이지의 개발은 필수적인 요건이라 할 수 있으며 이에 따라 초정밀 스테이지의 성능 조건을 만족시키기 위하여 다양한 구동기와 이동 가이드의 조합이 적용되어 왔다. 그 가운데에서도 빠른 응답 성능과 높은 분해능을 지닌 압전 소자(piezoelectric actuator)와 탄성 변형을 통하여 부드럽고 연속적인 운동을 제 공할 수 있는 유연 힌지(flexure hinge)의 조합이 널리 사용되 고 있다 (2,3) .…”

Section: 서 론unclassified

A Robust Control System Design for Compensating Hysteresis of a Piezoelectric Actuator-based Actuation Unit

Kim

Kim²

2012

Journal of manufacturing engineering & technology

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In this paper, we presents a robust control system design for compensating hysteresis of a piezoelectric actuator-based actuation unit. First, the dynamics between the input voltage and the output displacement of the actuation unit are unravelled via a non-parametric system identification method. From the dynamic characteristics of those experimental transfer functions, a parametric model is then derived, whose dynamics match those of the non-parametric ones under various conditions on input voltages. A robust controller is constructed on the basis of this parametric model in order not only to effectively compensate the hysteresis of the actuation unit but also to guarantee the robust stability. Extensive experiments show that the proposed robust control system successfully mitigate the effect of the hysteresis and improve the tracking capability of the actuation unit.

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Section: 서 론unclassified

A Robust Control System Design for Compensating Hysteresis of a Piezoelectric Actuator-based Actuation Unit

Kim

Kim²

2012

Journal of manufacturing engineering & technology

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“…A compact cantilever bimorph actuator is easy to be fabricated and in low cost, though it performs only weak forces of push or pull. Thus, bimorphs are commonly used for actuators in laminated micro pumps, pipe robots, and impact drive mechanisms [2][3][4][5][6][7][8], where the main requirement is not force but vibrating moments. In addition, some experimental results prove that the weak force of a bimorph can be greatly improved by fixing its two tips in the longitudinal direction while push or pull forces are produced from its middle part.…”

Section: Introductionmentioning

confidence: 99%

Piezoelectric film-actuated motion platform with high resolution

Hua

Zhang

Cheng

et al. 2008

Front. Mech. Eng. China

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A piezoelectric film-actuated motion platform with high resolution, which can run in two directions within a horizontal plane, is presented. On the basis of the analysis of the working principle of a stick-slip mechanism, a mathematical model describing its dynamic behavior is set up and simulated. Experiments of the motion performance and carrying ability on the prototype are conducted. Results show that this type of platform has advantages including a simple structure, small volume, light weight, stable step length, and large traveling range. When the driving voltage is less than 30 V, step error is less than 0.5 mm. The carrying ability of the platform is terrific and about 7-8 times its weight.

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“…Numerous literatures regarding this topic can be found in Ananthasuresh and Saxena (2000); Bharti and Frecker (2004);Furukawa et al (1995); Kota et al (1999); Pokines and Garcia (1998);Tian et al (2009);Yang et al (1996). In general, the performance of a CMDA is a function of some important parameters such as the material properties and the flexure hinge profile of the mechanical displacement amplifier.…”

Section: Introductionmentioning

confidence: 99%

Design and optimization of a XY compliant mechanical displacement amplifier

Eskandari

Ouyang

2013

Mech. Sci.

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Abstract. Piezoelectric actuators are increasingly becoming popular for the use in various industrial, pharmaceutical, and engineering applications. However, their short motion range limits their wide applications. This shortcoming can be overcome by coupling the piezoelectric actuators with a mechanical displacement amplifier. In this paper, a new design for a XY planar motion compliant mechanical displacement amplifier (CMDA) based on the design of a symmetric five-bar compliant mechanical amplifier is introduced. Detailed analysis with Finite Element Method (FEM) of static and dynamic characteristics of the proposed XY CMDA design is also provided. Finally, the optimization process and results to increase the Amplification Ratio (AR) of the proposed XY compliant mechanism with minimal compromise in Natural Frequency (NF) is discussed.

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Design and characterization of a low-profile micropositioning stage

Cited by 100 publications

References 4 publications

A Robust Control System Design for Compensating Hysteresis of a Piezoelectric Actuator-based Actuation Unit

A Robust Control System Design for Compensating Hysteresis of a Piezoelectric Actuator-based Actuation Unit

Piezoelectric film-actuated motion platform with high resolution

Design and optimization of a XY compliant mechanical displacement amplifier

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