Design and characterization of a low-vibration laboratory with cylindrical inertia block geometry
Wenjie Gong,
Yu Liu,
Wan-Ting Liao
et al.
Abstract:Many modern nanofabrication and imaging techniques require an ultra-quiet environment to reach optimal resolution. Isolation from ambient vibrations is often achieved by placing the sensitive instrument atop a massive block that floats on air springs and is surrounded by acoustic barriers. Because typical building noise drops off above 120 Hz, it is advantageous to raise the flexural resonance frequencies of the inertia block and instrument far above 120 Hz. However, it can be challenging to obtain a high fund… Show more
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