Design and Application of a Laser Confocal Probe

Abstract

To achieve the aim of precise measurement of a target micro-sphere, approximately 0.2 mm in diameter, a laser confocal probe was designed. To improve the output signal, a mathematical model of the photoelectric signal was proposed. The diameter of the pinhole was determined, and the optical path was adjusted; the oscillating units were designed. The performance of the probe was validated by experiments using gauge blocks combined with a micro-motion measuring mount model. Besides, a more accurate signal processing method was suggested.