Design and analysis of piezo actuated flexure guided nanopositioning stage

Pankaj,; Chandra, Vikash; Murat, Ram; Kumar, Viresh

doi:10.1016/j.matpr.2023.01.405

Cited by 3 publications

(2 citation statements)

References 22 publications

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“…This phenomenon enables the conversion of electrical energy into mechanical energy, which can then be utilized to induce displacements or apply forces [ 1 ]. Due to their lightweight nature, high resolution, accuracy, and ease of control, they have found extensive use in fast steering mirrors [ 2 , 3 ], nanopositioning stages [ 4 , 5 ] and structural dynamics applications [ 6 , 7 ]. Over the past few decades, the design principles governing piezoelectric actuators have undergone significant evolution, leading to the development of various types of actuators.…”

Section: Introductionmentioning

confidence: 99%

Experimental Validation of Two Types of Force Actuators: A Performance Comparison

Jiang,

Wang,

Zheng

et al. 2024

Sensors

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This paper experimentally investigates the performance of piezoelectric force actuators. Using the same encapsulated piezoelectric stack, an inertial-type actuator and a frame-type actuator are constructed for performance comparison. The experimental results are also used to validate the recently established actuator models, whilst the mechanical and piezoelectrical parameters of the models are experimentally identified. The performance of the actuators is described by the transmitted force(s) and input power flow from the actuators to the base structure with reference to the same electrical input voltage to the stack. The validation is deemed successful due to the strong agreement observed between the measured and predicted actuator performances. Additionally, it is discovered that the frame-type actuator has the capacity to produce significantly higher transmitted forces and input power flow to the base structure compared to the inertial-type actuator. The mechanism underlying the performance disparity between these two types of actuators is also examined. This paper clarifies the mechanism, shedding light on the design and optimization of piezoelectric actuators.

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Section: Introductionmentioning

confidence: 99%

Experimental Validation of Two Types of Force Actuators: A Performance Comparison

Jiang,

Wang,

Zheng

et al. 2024

Sensors

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“…The use of the piezoceramic devices as actuators can mainly be divided into three main areas: vibration suppressors [6], motors [7], and positioners [8]. The high reliability and positioning accuracy of such devices make it possible to use them in precision optical devices such as: fast steering mirrors [9,10], opto-mechanical adjustment systems (stepper motors [11], micro-and nanopositioning stages [12], etc. [13]), and piezoelectric wavefront correctors (bimorph [14][15][16][17][18][19][20][21], piezostack [22][23][24][25][26][27][28][29][30][31], etc.…”

Section: Introductionmentioning

confidence: 99%

Investigation of PZT Materials for Reliable Piezostack Deformable Mirror with Modular Design

Toporovsky,

Samarkin,

Kudryashov

et al. 2023

Micromachines

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This article presents a study of the electrophysical properties of a piezoceramic material for use in adaptive optics. The key characteristics that may be important for the manufacturing of piezoelectric deformable mirrors are the following: piezoelectric constants (d31, d33, d15), capacitance, elastic compliance values s for different crystal directions, and the dielectric loss tangent (tgδ). Based on PZT ceramics, the PKP-12 material was developed with high values of the dielectric constant, piezoelectric modulus, and electromechanical coupling coefficients. The deformable mirror control elements are made from the resulting material—piezoceramic combs with five individual actuators in a row. In this case, the stroke of the actuator is in the range of 4.1–4.3 microns and the capacitance of the actuator is about 12 nF.

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Nonlinear Evaluation of a Large-Stroke Coiled L-Shape Compliant Guiding Mechanism With Constant Stiffness

Ling,

Zhao,

et al. 2023

Journal of Mechanical Design

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Owing to the advantages of monolithic structure and little need for assembling, compliant guiding mechanisms appear to be an effective solution for decoupling multi-freedom precision motions but are still prone to geometric nonlinearities of parasitic error and stiffening effect for large strokes. This paper proposes a coiled L-shape compliant guiding mechanism featuring millimeter-scale strokes with a compact structure, constant stiffness and minimized parasitic error. The coiled compliant guiding mechanism is formed by convolving L-shape flexure beams in a zigzag configuration with decoupled XY motions achieved. Its geometrically nonlinear parasitic error, variation in stiffness and primary vibration are captured by using a dynamic beam constraint model (DBCM). It is theoretically, numerically and experimentally found, by comparing with double parallel guiding mechanisms, that the kinetostatic and dynamic behaviors of the coiled L-shape compliant mechanism are nearly independent on the applied force within the intermediate-deformation ranges. Such a weak geometric nonlinearity with the minimized influence of axially-loaded stiffening and kinematics-arching effects is much different from the double parallel guiding mechanisms. The obtained results indicate that large strokes with constant stiffness and invariable resonance frequency can be realized, which also allows small parasitic errors.

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Design and analysis of piezo actuated flexure guided nanopositioning stage

Cited by 3 publications

References 22 publications

Experimental Validation of Two Types of Force Actuators: A Performance Comparison

Experimental Validation of Two Types of Force Actuators: A Performance Comparison

Investigation of PZT Materials for Reliable Piezostack Deformable Mirror with Modular Design

Nonlinear Evaluation of a Large-Stroke Coiled L-Shape Compliant Guiding Mechanism With Constant Stiffness

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