Design and Analysis of MEMS-Based Actuator

Abstract

One Micro-Electro-Mechanical System(MEMS) based actuator that fabricated by LIGA (Lithographie ,Galanoformung and Abformung) technology was designed to distinguish the change of the exterior condition. In order to prove whether the parts in the actuator intervene each other during motion, ADAMS software was utilized to simulate the motion. The rigid-flexible coupling dynamic modeling of the design was obtained by combining finite element method (FEM) with Lagrange equation, the mathematics modeling was solved with Gear method in ADAMS. The results showed that the MEMS-based actuator could move smoothly, and the simulated curve meets the intent.