Design and Analysis of a New Excitation Structure for Magnetron Sputtering
Ze-da Su,
Yue-Jun An,
Hui An
et al.
Abstract:Magnetron sputtering systems are widely used for depositing industrially important coatings. Research has been conducted to optimize and improve these structures to increase coating effectiveness and target utilization. The paper investigates the engineering problem of uneven target etching caused by an uneven magnetic field in magnetron sputtering equipment. The characteristics of the desired magnetic field distribution required by magnetron sputtering equipment are analyzed, and a corresponding excitation st… Show more
Set email alert for when this publication receives citations?
scite is a Brooklyn-based organization that helps researchers better discover and understand research articles through Smart Citations–citations that display the context of the citation and describe whether the article provides supporting or contrasting evidence. scite is used by students and researchers from around the world and is funded in part by the National Science Foundation and the National Institute on Drug Abuse of the National Institutes of Health.