2022
DOI: 10.3390/mi13050786
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Design and Analysis of a Hybrid-Type RF MEMS Phase Detector in X-Band

Abstract: In this paper, we have designed, analyzed, and characterized a hybrid-type MEMS device for X-band phase shift measurement. The signal related to a phase shift of the inputs is fractionally in-line coupled by a MEMS beam and delivered to a thermoelectric power sensor, where the phase is ultimately converted into DC voltage output. With the hybrid of the MEMS beam and the thermoelectric power sensor, both in-line detection process and phase-DC voltage conversion is reserved, which is a benefit for large power ca… Show more

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Cited by 5 publications
(2 citation statements)
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“…8 shows the measured response curves of device. The response time is typically calculated by the average of the rise time and fall time [10]. As a result, the measured response time is approximately 11.1 ms.…”
Section: Response Characterizations Of Devicementioning
confidence: 99%
“…8 shows the measured response curves of device. The response time is typically calculated by the average of the rise time and fall time [10]. As a result, the measured response time is approximately 11.1 ms.…”
Section: Response Characterizations Of Devicementioning
confidence: 99%
“…In particular, when the geometric parameters need to be adjusted repeatedly, the device design cycle is greatly extended. Efficient surrogate models are used in device design to address time consumption [ 2 , 3 ]. The traditional modeling method usually develops and improves the model through continuous testing and repeated correction, which is a slow trial-and-error process.…”
Section: Introductionmentioning
confidence: 99%