Abstract:We propose a vertical linear motor (VLM) for a semiconductor manufacturing equipment that compensates for the weight of the moving part using the balance of magnetic and elastic forces. The developed VLM achieves zero stiffness with a constant upward force over a working range. The magnetic circuit of the VLM is designed to provide a linear negative stiffness over a ±2 mm stroke with an upward force of 14 N at a 0 mm stroke. The negative stiffness is compensated for by the positive stiffness of an elastic comp… Show more
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