Design and Analysis of a Novel Flexure-Based Dynamically Tunable Nanopositioner

Abstract

Various tools, such as biomedical manipulators, optical aligners, and ultraprecision manufacturing tools, implement nanopositioners that must be dynamically tunable to satisfy the requirements of different working conditions. In this paper, we present the design and analysis of a flexure-based nanopositioner with dynamically tunable characteristics for the implementation of a high-performance servomechanism. The nanopositioner is composed of four flexure beams that are positioned in parallel and symmetric configurations sandwiched between magnetorheological elastomers (MREs). The properties of MREs impart dynamicity to the nanopositioner, allowing the workspace, stiffness, and damping characteristics in particular to be tuned under the action of an external magnetic field. By utilizing elastic beam theory and electromagnetic field coupling analysis, kinetostatic and dynamic models of the proposed nanopositioner were established to predict the variable stiffness property and dynamically tunable characteristics. The models were validated by performing a finite element analysis. Herein, it is shown that the proposed nanopositioner model can actively adjust the trade-offs between the working range, speed, and sustained load capability by changing the magnetic field. The proposed dynamic tuning method offers new insight into the design of flexure-based nanopositioners for real applications.

Omnidirectional Manipulation of Microparticles on a Platform Subjected to Circular Motion Applying Dynamic Dry Friction Control

“…Ablay [ 17 ] studied a magnetic micromanipulator with a model-free controller and a linear controller for the manipulation of microparticles in a fluid. Li et al [ 18 ] presented a nanopositioning system composed of flexible beams mounted with magnetorheological elastomers. The properties of the beams, such as stiffness and damping, were able to be tuned under the influence of magnetic fields.…”

Analysis of Compliance and Kinetostatic of a Novel Class of n-4R Compliant Parallel Micro Pointing Mechanism

“…Chen G et al [ 19 ] combined Castigliano’s theorem, the Crotti–Engesser theorem, the beam constraint model, strain energy, and complementary strain energy, and established an energy-based kinetostatic modeling framework for compliant mechanisms. Li Z. et al [ 20 ] designed and analyzed a compliant nanopositioner with dynamically tunable characteristics, and established a kinetostatic model of the nanopositioner by utilizing elastic beam theory and electromagnetic field coupling analysis to predict the variable stiffness property and dynamically tunable characteristics. Li J. et al [ 21 ] established the kinetostatic model of the compliant two-stage differential micro-displacement amplification mechanism by matrix representation and optimized the position and geometric parameters of the flexure hinge.…”

Nonprehensile Manipulation of Parts on a Horizontal Circularly Oscillating Platform with Dynamic Dry Friction Control

“…Parts on a horizontal platform can be moved by various means. For example, this can be performed by using parallel manipulators [ 1 , 2 , 3 , 4 ] by applying piezoelectric or electromagnetic actuated planar micromanipulators [ 5 , 6 , 7 , 8 ], by pushing with robot end-effectors [ 9 , 10 , 11 ], by transporting with devices which move together with the parts to be displaced (e.g., mobile robots) [ 12 , 13 , 14 ], by employing actuator arrays under a flexible surface [ 15 ], by applying acoustic manipulation techniques [ 16 , 17 , 18 , 19 ], etc.…”