Abstract:This paper presents the design & modeling of distributed MEMS phase shifter for Ka band RF systems. The phase shift can be achieved by periodically placing the MEMS bridge variable capacitors as per Bragg frequency criteria on coplanar waveguide (CPW) using GaAs substrate. The EM & electromechanical simulation are carried out with various structural parameters to optimize the designs. The novelties like low insertion loss, low actuation voltage with distributed actuation pads & separate DC and RF a… Show more
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