Design a common optical path system for near- and far-field detection of optical phased array chips
Yanhua Shen,
Xingxin Fan,
Zhiyu Chen
et al.
Abstract:With the development of optical phased array (OPA) chips, it is urgent to design an optical system for detecting OPA chips. We propose a near-and far-field common optical path detection system adapted to commercial cameras. By changing the focal length of the rear set of lenses, the optical system can be used to realize the nearfield detection, far-field field of view (FOV) detection, and far-field resolution detection of OPA chips. The object spatial resolution of the near-field system is 1.11 μm, and the far… Show more
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