Abstract:A spring-mass-damper system and corresponding equivalent circuit help design and analyze capacitive micromachined ultrasonic transducers (CMUTs). The ability to extract similar models from measured devices helps design verification and development of simulation models that match fabricated devices. Impedance measurements yield the CMUT's clamped capacitance and motional impedance, which fits a 4-element equivalent circuit. Additional measurements help extract a more complete equivalent circuit that includes th… Show more
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