Der König in Thule und die Dichtungen von der Lorelay

Salinger, Herman; Beutler, Ernst

doi:10.2307/40088985

Cited by 2 publications

(3 citation statements)

References 0 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…This results in films with anisotropic physical properties such as a tilted columnar morphology. Adding substrate rotation (rotation angle, φ) results in another degree of freedom and the technique is termed GLAD, see Figure 1a [21][22][23]. As a result, films with complex architectures such as chevrons, nanospirals, inclined columns and branched nanocolumns have been grown [14,[24][25][26][27][28][29][30] for applications such as optical sensors, pressure sensors, field emitters, gas sensors, photonics, wettability, and biocompatibility [31][32][33][34][35][36][37][38].…”

Section: Introductionmentioning

confidence: 99%

“…However, subsequent growth is a competitive process and has a preferred orientation due to the GLAD configuration. Thanks to this oblique growth configuration, the region behind the nucleus is shadowed and incoming atoms deposit on the exposed surface of the nuclei aligned towards the source of incoming flux [22]. This line-of-sight deposition is termed "ballistic shadowing" and results in tilted, separate columns of different heights oriented towards the source with an angle β from the substrate's normal (illustrated in Figure 1b).…”

Section: Introductionmentioning

confidence: 99%

“…Elucidation of such column and flux inclinations from substrate normal became imperative after some early reports demonstrated birefringent and dichromatic properties of deposited films as a direct result of film morphology [21,22]. This morphology was achieved by manipulating substrate rotation while impinging flux arrived at the substrate from an oblique angle resulting in a thin film composed of nanospirals.…”

Section: Introductionmentioning

confidence: 99%

See 2 more Smart Citations

Glancing Angle Deposition and Growth Mechanism of Inclined AlN Nanostructures Using Reactive Magnetron Sputtering

et al. 2020

View full text Add to dashboard Cite

Glancing angle deposition (GLAD) of AlN nanostructures was performed at room temperature by reactive magnetron sputtering in a mixed gas atmosphere of Ar and N2. The growth behavior of nanostructures shows strong dependence on the total working pressure and angle of incoming flux. In GLAD configuration, the morphology changed from coalesced, vertical nanocolumns with faceted terminations to highly inclined, fan-like, layered nanostructures (up to 38°); while column lengths decreased from around 1743 to 1068 nm with decreasing pressure from 10 to 1.5 mTorr, respectively. This indicates a change in the dominant growth mechanism from ambient flux dependent deposition to directional ballistic shadowing deposition with decreasing working pressures, which is associated with the change of energy and incident angle of incoming reactive species. These results were corroborated using simulation of metal transport (SiMTra) simulations performed at similar working pressures using Ar and N separately, which showed the average particle energy and average angle of incidence decreased while the total average scattering angle of the metal flux arriving at substrate increased with increasing working pressures. Observing the crystalline orientation of GLAD deposited wurtzite AlN nanocolumns using X-ray diffraction (XRD), pole-figure measurements revealed c-axis <0001> growth towards the direction of incoming flux and a transition from fiber-like to biaxial texture took place with increasing working pressures. Under normal deposition conditions, AlN layer morphology changed from {0001} to {101¯1} with increasing working pressure because of kinetic energy-driven growth.

show abstract