2011
DOI: 10.1002/sia.3441
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Depth profiling of anodic tantalum oxide films with gold cluster ions

Abstract: In order to investigate the merits of cluster bombardment for inorganic sputter depth profiling, thin (50-nm) anodic Ta 2 O 5 films were analyzed by ToF-SNMS using 25 keV Au n + projectile ions. The same focused primary ion beam was employed both for sputter erosion and (static) data acquisition. Sputtered neutral particles were postionized by means of single photon ionization using a 157 nm F 2 excimer laser. The results show that, for the amorphous films investigated here, the transition from mono-to polyato… Show more

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Cited by 4 publications
(4 citation statements)
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“…approximated by Au + at 7.5 and 5 keV respectively. This method for approximating cluster ion sputtering has been shown to be valid for materials with large sublimation energies where the nonlinear sputter yield enhancements are small [31]. Although it is not possible to make a direct comparison to the experimental results, the data provided by the SRIM calculation provides valuable insight into the mechanism of energy transfer between the primary ion and the target atoms.…”
Section: Resultsmentioning
confidence: 99%
“…approximated by Au + at 7.5 and 5 keV respectively. This method for approximating cluster ion sputtering has been shown to be valid for materials with large sublimation energies where the nonlinear sputter yield enhancements are small [31]. Although it is not possible to make a direct comparison to the experimental results, the data provided by the SRIM calculation provides valuable insight into the mechanism of energy transfer between the primary ion and the target atoms.…”
Section: Resultsmentioning
confidence: 99%
“…These ratios can also vary on the uppermost surface being analyzed vs. what constitutes the bulk, or the equilibrium measurement beneath the surface. ToF-SIMS is routinely used as a depth-profiling tool to monitor the distributions of chemical species vs. depth, [17][18][19][20][21][22][23][24] but those analyses are often interested in chemical changes over tens to hundreds of nanometers. The three-dimensional orientation of NP aggregates studied here, with all individual NP diameters under 20 nm, requires a more surface-sensitive approach than what is generally eroded in each analysis cycle in traditional depth profiling experiments.…”
Section: Towards Monitoring Differences In Surface Chemistry Of Depos...mentioning
confidence: 99%
“…In molecular SIMS analysis, post-ionization (also known as secondary neutral mass spectrometry) is generally achieved through laser post-ionization (LPI). Up to now the technique has been used in a wealth of experiments, including the detection of trace elements, polyaromatic hydrocarbons, molecules in tissues and cells [18][19][20], the depth profiling of thin films [21], and fundamental studies of the sputtering process [22] to name a few.…”
Section: Introductionmentioning
confidence: 99%