Depth profile analyses with sub 100-nm depth resolution of a metal thin film by femtosecond - laser ablation - inductively coupled plasma - time-of-flight mass spectrometry

Novel 2D binning approach for advanced LIMS depth profiling analysis

“…Besides the technical improvements of the instrumentation, which involve, amongst others, the detection sensitivity and the dynamic range of the analysers, also the commercialisation of new and less expensive femtosecond laser systems that, e.g., allow for a clean and controlled removal of the material signicantly contributed to the popularity of this technique. [6][7][8][9][10] The chemical analysis of solids by continuously applying a dened number of laser shots to a xed surface position before changing to a proximal surface position (single crater analysis approach), e.g., ref. [11][12][13], and the layerby-layer material removal strategy with single laser pulses per position and per layer 14,15 are two commonly used measurement protocols that allow a 3D chemical reconstruction of the solid's composition.…”

Single shot laser ablation MC-ICP-MS for depth profile analysis of U isotopes in UO2 single crystals

“…1 Nowadays, the accurate and precise determination of the elemental and/or isotopic composition of advanced crystalline materials is of utmost importance to guarantee their properties and to identify potential contaminants. [2][3][4][5][6][7][8][9][10][11][12] Classical analytical approaches employing dissolution of a fragment of such materials followed by subsequent chemical analysis are not effective because their features are captured either in thin (nm to mm thick) layers or within local hot spots. Therefore, solid sampling techniques such as Electro-Thermal Vaporisation (ETV) or Laser Ablation (LA) are employed frequently for this purpose.…”

“…11,12 In addition, depth proling capabilities of LA provide sub-mm depth resolution. 4,[6][7][8] Despite all of its advantages, LA-ICP-MS suffers from some important limitations such as non-uniform ablation processes and matrix-dependent melting events. 6,8 These drawbacks are known to be less prominent for fs-LA units compared to their ns-counterparts.…”

“…4,[6][7][8] Despite all of its advantages, LA-ICP-MS suffers from some important limitations such as non-uniform ablation processes and matrix-dependent melting events. 6,8 These drawbacks are known to be less prominent for fs-LA units compared to their ns-counterparts. 3 Employing laser beam homogenisers, thereby converting the Gaussian beam proles into at-top beam proles, further improvements of the analytical performance have been achieved.…”

“…3 Employing laser beam homogenisers, thereby converting the Gaussian beam proles into at-top beam proles, further improvements of the analytical performance have been achieved. 8,13 Depth proling may suffer from so-called downhole fractionation (DHF), mainly caused by differences in the volatility and chemical properties of the measured elements. 14,15 For a given number of laser pulses, this phenomenon occurs earlier in small-diameter laser spots (greater depth/width ratio) compared to large-diameter spots.…”