2019
DOI: 10.1007/978-981-13-9419-5_8
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Deposition of ZnO Thin Film at Different Substrate Temperature Using RF Sputtering for Growth of ZnO Nanorods Using Hydrothermal Method for UV Detection

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Cited by 2 publications
(1 citation statement)
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“…In sputtering, the target purity and the chamber pressure, i.e. the pressure of the argon gas, plays an important role in the deposition of the seed layer (Sannakashappanavar et al, 2020). The role of chamber pressure is that it effects the sputtering efficiency, while for deposition of ZnO, if the target used is of metallic zinc, the oxygen environment will ensure the deposition of ZnO, moreover, it counteracts the most common defect of oxygen vacancies in the growth of ZnO.…”
Section: Growth Of Seed Layer Via Sputteringmentioning
confidence: 99%
“…In sputtering, the target purity and the chamber pressure, i.e. the pressure of the argon gas, plays an important role in the deposition of the seed layer (Sannakashappanavar et al, 2020). The role of chamber pressure is that it effects the sputtering efficiency, while for deposition of ZnO, if the target used is of metallic zinc, the oxygen environment will ensure the deposition of ZnO, moreover, it counteracts the most common defect of oxygen vacancies in the growth of ZnO.…”
Section: Growth Of Seed Layer Via Sputteringmentioning
confidence: 99%