Deposition of well adhering cBN films up to 2 μm thickness by B–C–N gradient layer system

Yamamoto, Kenji; Keunecke, M.; Bewilogua, K.

doi:10.1016/s0040-6090(00)01364-x

Cited by 71 publications

(41 citation statements)

References 26 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…They claimed that c-BN film delamination occurs due to interface failure and not due the high stresses. This problem can be removed by adopting such approach [18]. Another important experimental effort has been made to investigate the effects of the nitrogen incorporation into boron carbide films [19,20].…”

Section: Introductionmentioning

confidence: 99%

Boron Carbide and Boron-Carbon Nitride Films Deposited by DC-Magnetron Sputtering: Structural Characterization and Nanotribological Properties

Freire

Reigada

Prioli

2001

phys. stat. sol. (a)

View full text Add to dashboard Cite

The effects of nitrogen incorporation into amorphous boron carbide (B 4 C) films were studied. The films were deposited by dc-magnetron sputtering with the Si substrates at room temperature. The nitrogen incorporation occurs at the expense of the boron content. The main feature of infrared absorption spectra obtained from B 4 C films is a broad band at around 1100 cm --1 that shifts to higher wavenumbers upon nitrogen incorporation. The spectra obtained from films with higher nitrogen content are typical of hexagonal boron nitride. The friction coefficient and the surface wear were studied by lateral force microscopy. The influence of several parameters like relative humidity, scanning velocity and load force was investigated. For boron-carbon nitride films, a weak dependence on the relative humidity of wear and friction coefficients was observed. In the case of B 4 C films, there is a clear correlation between the wear depth and the energy deposited at the AFM tip-film interface.

show abstract

Section: Introductionmentioning

confidence: 99%

Boron Carbide and Boron-Carbon Nitride Films Deposited by DC-Magnetron Sputtering: Structural Characterization and Nanotribological Properties

Freire

Reigada

Prioli

2001

phys. stat. sol. (a)

View full text Add to dashboard Cite

show abstract

“…of bilayers Young Modulus [GPa] No. of bilayers Many factors are attributable to improving hardness, Young modulus, and adhesion of the coating [5,6,8,9], among these is the deposition of a 300-nm thick TiN adhesion layer, which has a good compatibility to steel substrate and to the subsequent B 4 C film. Also important is the introduction of a compositional gradient of BCN, which allows a smooth and continuous transition of the mechanical properties from B 4 C to c-BN coatings.…”

Section: Resultsmentioning

confidence: 99%

Cutting tool performance enhancement by using a B₄C/BCN/C‐BN multilayer system

Gaitán

Caicedo

Balogh

2007

Phys. Status Solidi (c)

View full text Add to dashboard Cite

Thin films of B 4 C/BCN/c-BN multilayers were deposited on to AISI M2 high speed steel substrates by r.f. (13.56 MHz) multi-target magnetron sputtering from high purity (99.99 %) h-BN and a (99.5%) B 4 C target, in an Ar (90%)/N 2 (10%) gas mixture. For their deposition we varied the bias voltage of the B 4 C films between -50 and -250 V and, for the BCN coatings the nitrogen gas flow from 3% to 12%. A 300-nm thick TiN buffer layer was first deposited to improve the adhesion of all samples. Mechanical properties like hardness, elastic Young modulus, and adhesion were determined by nanoindentation and scratch measurements. Finally, cutting tools were coated with 2, 5, 12, and 16 bilayers of B 4 C/BCN/c-BN. Machining tests on steel bars and plates were carried out. Tool performance was registered as functions of bilayer numbers showed enhancement between 60% and 107% and a surface roughness reduction of 60% for cutting tools coated with 16 bilayers, compared to uncoated tools.

show abstract

“…Various buffer interlayers including boron, [29] boron carbide, [30] b-SiC, [31] AlN, [32] B-C-N gradient layer, [33] B-rich BN layer, [34,35] tensile BN buffer layer, [36] and Zr-rich composite layer [37] have been incorporated to overcome these problems. Very recent experiments have shown that strongly-adherent cBN can grow on diamond directly and epitaxially without the aBN/tBN interfacial layer and the nucleation stage.…”

Section: Introductionmentioning

confidence: 99%

Synthesis and Mechanical Properties of Cubic Boron Nitride /Nanodiamond Composite Films

Chong¹,

Ma²,

Leung³

et al. 2006

Chemical Vapor Deposition

View full text Add to dashboard Cite

Large-area cubic boron nitride/nanocrystalline diamond (cBN/ND) composite films were deposited on silicon substrates using plasma-assisted (PA) CVD processes, and a systematic study of their mechanical properties was carried out. The direct growth of cBN on ND without an amorphous and turbostratic BN interfacial layer dramatically improves the adherence of cBN films. Because of the strengthened adhesion and improved mechanical properties due to the layered structure and the smooth surface, the composite films could be used in mechanical and some device applications.

show abstract

Deposition of well adhering cBN films up to 2 μm thickness by B–C–N gradient layer system

Cited by 71 publications

References 26 publications

Boron Carbide and Boron-Carbon Nitride Films Deposited by DC-Magnetron Sputtering: Structural Characterization and Nanotribological Properties

Boron Carbide and Boron-Carbon Nitride Films Deposited by DC-Magnetron Sputtering: Structural Characterization and Nanotribological Properties

Cutting tool performance enhancement by using a B₄C/BCN/C‐BN multilayer system

Synthesis and Mechanical Properties of Cubic Boron Nitride /Nanodiamond Composite Films

Contact Info

Product

Resources

About

Deposition of well adhering cBN films up to 2 μm thickness by B–C–N gradient layer system

Cited by 71 publications

References 26 publications

Boron Carbide and Boron-Carbon Nitride Films Deposited by DC-Magnetron Sputtering: Structural Characterization and Nanotribological Properties

Boron Carbide and Boron-Carbon Nitride Films Deposited by DC-Magnetron Sputtering: Structural Characterization and Nanotribological Properties

Cutting tool performance enhancement by using a B4C/BCN/C‐BN multilayer system

Synthesis and Mechanical Properties of Cubic Boron Nitride /Nanodiamond Composite Films

Contact Info

Product

Resources

About

Cutting tool performance enhancement by using a B₄C/BCN/C‐BN multilayer system