2006
DOI: 10.1039/b516329c
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Deposition of stable hydrophobic coatings with in-line CH4 atmospheric rf plasma

Abstract: A CH 4 atmospheric rf plasma treatment process was demonstrated for hydrophobic treatments of various substrates including metallic and insulating surfaces as well as flat and rough surfaces. A stable rf glow plasma was generated over a 1 cm 6 16 cm area using a cylindrical electrode geometry. A typical hydrophobic treatment speed was 5-10 cm min 21 . CH 4 plasma polymerization deposited a very smooth hydrocarbon layer composed of CH 2 and CH 3 groups. The inclusion of oxygenated species was less than 1%. On f… Show more

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Cited by 63 publications
(51 citation statements)
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“…Figure 3 depicts the voltage-versus-charge plot or the so-called Lissajous figure. As stated before, this Lissajous figure can be used to calculate the electrical power [8], which in this case is equal to 17.4 W.…”
Section: Electrical Characterization Of the Dischargementioning
confidence: 99%
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“…Figure 3 depicts the voltage-versus-charge plot or the so-called Lissajous figure. As stated before, this Lissajous figure can be used to calculate the electrical power [8], which in this case is equal to 17.4 W.…”
Section: Electrical Characterization Of the Dischargementioning
confidence: 99%
“…Among many techniques that can be utilized for this purpose, a plasma-based process is very attractive in many ways [8,9]. Plasma surface modification does not require the use of water and chemicals, so it can be considered as an environmentally benign technology [9].…”
Section: Introductionmentioning
confidence: 99%
“…However, the use of low pressure plasma polymerisation techniques has important limitations for industrial applications. Some of the disadvantages include the requirement for expensive vacuum pumping systems, the restriction to the use of vacuum compatible materials, low deposition rates and the difficulty to develop continuous processing systems [21][22][23]. As a result of these limitations, nowadays there has been considerable interest in the development of atmospheric pressure non-thermal plasma sources suitable for thin film deposition [21,22,24].…”
Section: Introductionmentioning
confidence: 99%
“…The film obtained during the positive corona exhibits peaks at 2958, 2932 and 2872 cm -1 corresponding to CH 3 asymmetric stretch, CH 2 asymmetric stretch and CH 2 symmetric stretch, respectively [46][47][48][49], indicating the higher composition of hydrogen in the hydrocarbon film ( figure 12). For the film obtained during the negative corona discharge, the presence of mainly two peaks at 2918 and 2849 cm -1 in the aliphatic C-H stretching region corresponding to CH 2 asymmetric stretch and CH 2 symmetric stretch, respectively, is indicating the presence of long hydrocarbon polymeric chain in the film [50].…”
Section: Deposited Film Characterizationmentioning
confidence: 99%