Deposition of smooth, oriented diamond films using microwave plasma chemical vapor deposition

Celii, F. G.; White, Daniel D.; Purdes, A. J.

doi:10.1016/0040-6090(92)90512-a

Cited by 28 publications

(13 citation statements)

References 28 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…With little or no Ar addition, the mainly H 2 atmosphere produced diamond powder with well‐defined, micro‐scale facetted crystallites. [ 32 ] This is consistent with what is known [ 33,34 ] about the mechanisms for the growth of diamond via CVD, which relies on a high ratio of H atoms to carbon radical species (H: C x H y ) near the surface to deposit sp 3 diamond rather than sp 2 graphitic carbon. In our CVD system, the graphite disks act as the carbon source, which is etched by H atoms to form the gas‐phase CH 3 radicals responsible for diamond growth.…”

Section: Resultssupporting

confidence: 88%

Hydrophobicity and Adhesion of Aggregated Diamond Particles

Yao

Dai

May

et al. 2020

Physica Status Solidi (a)

View full text Add to dashboard Cite

Diamond powders with high hydrophobicity are prepared by etching graphite plates using a hydrogen/argon (H2/Ar) plasma. The morphology and size of the diamond powders are found to vary with the proportion of Ar in H2 from 0% to 50%. Wettability is measured using water contact angle (WCA) measurements giving values between 129.7° and 146.9°. The high hydrophobicity can be ascribed to the aggregated structure of the as‐grown diamond powders. To check this assumption, the aggregated diamond powders are separated into individual particles by mechanical grinding; then, the WCAs of separated as‐grown diamond powders and commercial dispersed diamond powders are compared. The separated diamond surfaces show the lower WCAs of 99.68° and 96.96°. The surface of the aggregated diamond powders also exhibits high adhesion to water. The diamond surface grown in 2% Ar suspends 40 μL of water under a tilt angle of 180°. Such aggregated diamond powders are promising for no‐loss liquid transportation.

show abstract

Section: Resultssupporting

confidence: 88%

Hydrophobicity and Adhesion of Aggregated Diamond Particles

Yao

Dai

May

et al. 2020

Physica Status Solidi (a)

View full text Add to dashboard Cite

show abstract

“…The XRD pattern of a representative diamond film prepared by magnetron sputtering of a vitreous carbon target is shown in figure 1. Strong reflections from (111), (220) and (311) planes could be observed for films deposited on molybdenum and mica substrates kept at -900-1200 K during deposition, The above feature compared well with those observed by Celii et al (1992) and Guo and Yu (1992) for diamond films grown by CVD on silicon and molybdenum substrates. The:lattice constant (a) evaluated from XRD studies was equal to 0.3583 nrn which compared well ~¢ith that obtained by Sawabe and Inuzuka (1986).…”

Section: Structural Studiessupporting

confidence: 71%

Preparation and characterization of diamond films

Chaudhuri

Pal

1994

Bull. Mater. Sci.

View full text Add to dashboard Cite

Diamond films were deposited by magnetron sputtering of vitreous carbon disc and also by plasma CVD technique using C2H 2 + H 2 or CO 2 + H 2 gas mixtures. The films were characterized by measuring the electrical, optical and microstructural properties. FTIR and Raman studies were carried out to study the effect of sp 2 and sp 3 bonds present in the films. The films had a high mechanical stress which was determined from the broadening of the optical absorption tail in the films.

show abstract

“…NCD films exhibit a continuous variation in material properties and defect concentrations which depend on the growth methods, reactant species, substrate temperature, and reactor pressure. The methods include plasma-enhanced (PE)CVD (microwave, [9,12,[14][15][16]20,21,78,84,85] electron cyclotron resonance, [23][24][25] DC glow discharge, [86,87] and hot filament-assisted CVD. [88][89][90][91][92] In Table 1 several subclasses of NCD were identified based on the use of higher methane concentrations (1-4% CH 4 in H 2 ), [74] biased plasma (energetic ion flux), [77,78] nitrogen addition, [82,93] and very low CH 4 concentrations (0.1 to 0.5% CH 4 in H 2 ).…”

Section: Historical Overviewmentioning

confidence: 99%

The CVD of Nanodiamond Materials

Butler

Sumant

2008

Chemical Vapor Deposition

338

261

View full text Add to dashboard Cite

The growth and characteristics of nanocrystalline diamond thin films with thicknesses from 20 nm to less than 5 mm are reviewed. These materials contain between 95% and >99.9% diamond crystallites, the balance being made up from other forms of carbon. Within this class of materials there is a continuous range of composition, characteristics, and properties which depend on the nucleation and growth conditions. It is convenient to classify these films as either ultra-nanocrystalline-diamond (UNCD) or nanocrystalline-diamond (NCD) based on their microstructure, properties, and growth environment. In general, UNCD materials are composed of small particles of diamond ca. 2-5 nm in size with sp 2 -carbon bonding between the particles. UNCD is usually grown in argon-rich, hydrogen-poor CVD environments, and may contain up to 95-98% sp 3 -bonded carbon. NCD materials start with high density nucleation, initiating nanometer-sized diamond domains which grow in a columnar manner with the grain size coarsening with thickness. NCD is generally grown in carbon-lean and hydrogen-rich environments. NCD and UNCD exhibit an interesting range of physical properties which find use in X-ray windows and lithography, micro-and nanomechanical and optical resonators, tribological shaft seals and atomic force microscopy (AFM) probes, electron field emitters, platforms for chemical and DNA sensing, and many other applications.

show abstract

Deposition of smooth, oriented diamond films using microwave plasma chemical vapor deposition

Cited by 28 publications

References 28 publications

Hydrophobicity and Adhesion of Aggregated Diamond Particles

Hydrophobicity and Adhesion of Aggregated Diamond Particles

Preparation and characterization of diamond films

The CVD of Nanodiamond Materials

Contact Info

Product

Resources

About