2005
DOI: 10.1016/j.surfcoat.2005.02.004
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Deposition of SiOx diffusion barriers on flexible packaging materials by PECVD

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Cited by 85 publications
(63 citation statements)
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“…The combination of polymer materials with functional and protective coatings offers a number of key advantages over alternative bulk materials. SiO x or Al x O y coated films offer several advantages such as high gas barrier, microwaveable, light weight, design freedom, and transparency (Bieder, Gruinger, & Rohr, 2005;Czeremuszkin, Latreche, Wertheimer, & Sobrinho, 2001;Leterrier, 2004).…”
Section: Introductionmentioning
confidence: 99%
“…The combination of polymer materials with functional and protective coatings offers a number of key advantages over alternative bulk materials. SiO x or Al x O y coated films offer several advantages such as high gas barrier, microwaveable, light weight, design freedom, and transparency (Bieder, Gruinger, & Rohr, 2005;Czeremuszkin, Latreche, Wertheimer, & Sobrinho, 2001;Leterrier, 2004).…”
Section: Introductionmentioning
confidence: 99%
“…Presently, polymer films with thin, inorganic metal oxide coatings are used in the retort pouch industry as non-foil barrier materials. For instance, SiO x or Al x O y coated materials are two such inorganic coated films that offer several advantages such as high gas barrier, microwaveable, light weight, design freedom, and transparency (Bieder, Gruinger, & Rohr, 2005, Czeremuszkin, Latreche, Wertheimer, & Sobrinho, 2001, Leterrier, 2003. Another type of barrier coating, especially organic material coating, on polymer films has been reported (Deng, Wang, Liu, & Yang, 2009;Gupta, Plummer, Bisson, Frey, & Hilborn, 2002;Mauricio, Carvalho, Radovanovic, Muniz, & Rubira, 2009).…”
Section: Introductionmentioning
confidence: 99%
“…[5][6][7] Hence, applications range from gas barriers in the packaging industry, [5,7,8] anticorrosive, protective coatings for metal surfaces against water vapor, and oxygen barriers for flexible solar cells, [9,10] multilayer arrangements for applications in electronics, [11] flexible organic light-emitting diodes (OLEDs) [12] and vacuum-insulated panels (VIPs). [13] State of the art for producing such layers are physical vapor deposition (PVD), [14] plasma-enhanced chemical vapor deposition (PECVD), [15,16] reactive sputtering, [17] and sol-gel procedures. [18] Because these techniques may not always be applied to sensitive polymers, alternative processes, preferably ones which can be run at ambient temperature and pressure, need to be developed.…”
Section: Introductionmentioning
confidence: 99%