Deposition of Si-DLC films with high hardness, low stress and high deposition rates

Damasceno, J. C.; Camargo, S.S.; Freire, F.L.; Carius, R.

doi:10.1016/s0257-8972(00)00932-4

Cited by 120 publications

(50 citation statements)

References 22 publications

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“…Inclusion of Si within DLC films is known to alter the films properties. This includes influencing the sp 2 /sp 3 ratio, typically by increasing the sp 3 fraction (7,(30)(31)(32). Furthermore, as low a doping of 1-2 % Si can reduce internal stresses associated with the film (6).…”

Section: Discussionmentioning

confidence: 99%

Repressing oxidative wear within Si doped DLCs

Lanigan

Wang

Morina

et al. 2016

Tribology International

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Diamond-like Carbon coatings are well-known for their excellent wear and friction reducing properties. Novel DLCs are constantly being developed that further these beneficial characteristics; this is often achieved by incorporating a dopant into the microstructure of the DLC. One dopant that is widely used currently in commercial settings, including F1 car engines, is silicon. Si doping can be, to some extent, regarded as a double-edged sword. This is because, whilst it has been reported as being able to reduce friction in certain environments, this usually comes at the cost of far higher wear than the corresponding un-doped DLC. The fundamental aspects of Si-DLC's friction and wear properties are explored herein with the goal of optimising the coating using fundamental tribochemical knowledge.

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Section: Discussionmentioning

confidence: 99%

Repressing oxidative wear within Si doped DLCs

Lanigan

Wang

Morina

et al. 2016

Tribology International

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“…Si-incorporated DLC (Si-DLC) coatings have attracted special research interest due to their potential to improve several properties of pure DLC coatings such as hardness, friction coefficient, wear and corrosion resistance, and biocompatibility. 8 This remarkable collection of properties has led many researchers to investigate the potential of Si-DLC coatings as a protective coating for biomaterials. The wear and corrosion resistance of Si-DLC coatings on STS 316L were improved with increasing Si content owing to high sp 3 bonding, that is, Si addition has the beneficial effect of promoting surface nucleation.…”

Section: Introductionmentioning

confidence: 99%

Wear‐corrosion performance of Si‐DLC coatings on Ti‐6Al‐4V substrate

Kim

Lee

Yang

2007

J Biomedical Materials Res

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Si-incorporated diamond-like carbon (Si-DLC) coatings ranging from 0 to 2 at % Si were deposited on Tialloy substrate by means of radio frequency plasmaassisted chemical vapor deposition (r.f. PACVD) technique, using a mixture of benzene (C 6 H 6 ) and silane (SiH 4 ) as the reaction gas. The synergy in wear and corrosion of Si-DLC coatings was investigated by tribological and electrochemical techniques. The electrolyte used in this test to simulate the corrosive environment of body fluid was a 0.89 wt % NaCl solution of pH 7.4 at 378C. This study provides quantitative data for the assessment of the effect of Si incorporation on the synergistic effect between wear and corrosion in the simulated body fluid environment. In conclusion, tribological and electrochemical measurements showed that the Si-DLC films could improve wear-corrosion resistance in the simulated body fluid environment owing to the lower friction coefficient, corrosion rate, delamination area, and water uptake.

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“…Notice that the hardness of amorphous SiC has been reported to be of around 20 -25 GPa [7,8], which is reasonably close to that of a-C:H (hydrogenated DLC). Other reported beneficial effects of Si addition are the enhancement in thermal stability [9,10] and improved adhesion when compared to undoped DLC [11]. The coefficient of friction of DLC:Si has also been reported to be less sensitive to environment conditions [12].…”

Section: Introductionmentioning

confidence: 99%

Investigation of non-hydrogenated DLC:Si prepared by cathodic arc

Monteiro¹,

Delplancke‐Ogletree²

2003

Surface and Coatings Technology

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Abstract:Non-hydrogenated DLC films (also referred as ta-C) have been extensively studied and are used for a variety of wear related applications. Alloying DLC with refractory metals and other elements have been shown to be promising techniques to overcome some of the problems associated with pure DLC, such as excessive level of intrinsic stresses and high-temperature stability. The microstructure of DLC:Me in general consists of crystalline metal carbides dispersed in a DLC matrix. In contrary, DLC:Si has an amorphous structure. We have used filtered cathodic arc to prepare DLC:Si up to 6% Si, and have characterized their structure and bonding using microscopy (TEM) and spectroscopy (XPS, NEXAFS). The effect of Si in changing the bonding configuration of the C network is discussed. The microstructure is then correlated to hardness and friction measured by nano-indentation and micro-wear.

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Deposition of Si-DLC films with high hardness, low stress and high deposition rates

Cited by 120 publications

References 22 publications

Repressing oxidative wear within Si doped DLCs

Repressing oxidative wear within Si doped DLCs

Wear‐corrosion performance of Si‐DLC coatings on Ti‐6Al‐4V substrate

Investigation of non-hydrogenated DLC:Si prepared by cathodic arc

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