2006
DOI: 10.1016/j.snb.2006.04.035
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Deposition of Pt-catalyst in a micro-channel of a silicon reactor: Application to gas micro-TAS working at high temperature

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Cited by 18 publications
(14 citation statements)
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References 18 publications
(16 reference statements)
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“…Thus, separation of N 2 , CO, and C 2 hydrocarbons is possible. The MULTUM will be combined with a gas-chromatograph with micro-total analysis system 32) , which focuses to separate major gas components, such as H 2 O, CO 2 , NH 3 , CH 4 , and other light hydrocarbons (Table 2). For detailed isotopic analyses, including 17 O, a high-resolution infrared spectrometer would be required to measure the three isotopic ratios of oxygen with high accuracy.…”
Section: Tk_10mentioning
confidence: 99%
“…Thus, separation of N 2 , CO, and C 2 hydrocarbons is possible. The MULTUM will be combined with a gas-chromatograph with micro-total analysis system 32) , which focuses to separate major gas components, such as H 2 O, CO 2 , NH 3 , CH 4 , and other light hydrocarbons (Table 2). For detailed isotopic analyses, including 17 O, a high-resolution infrared spectrometer would be required to measure the three isotopic ratios of oxygen with high accuracy.…”
Section: Tk_10mentioning
confidence: 99%
“…This heating element is used to heat the device at temperatures up to 500 • C with a very homogeneous distribution of the temperature considering the good thermal conductivity of the silicon, as it was reported in our previous work on microreactor for gas-solid catalyst [17] and as shown in Fig. 3 on the right hand side.…”
Section: Preconcentrator Fabricationmentioning
confidence: 99%
“…In a previous study a catalytic microreactor has been developed to act as a filter to improve the selectivity to methane of a sensor placed downstream of the device [17]. The present work aims at developing a silicon preconcentrator device based on this concept, with new approaches in the design as well as in the choice of materials, replacing the catalyst by a gas absorbent material.…”
Section: Introductionmentioning
confidence: 99%
“…In a previous study, such a device has been developed for catalytic conversion either for hydrogen production [10] or for gas transformation to improve the selective detection by a sensor placed at the exit of the micro-fluidic reactor [11]. In order to achieve these objectives, a silicon micro-reactor with micro-channels fabricated by deep reactive ion etching (DRIE) has been developed.…”
Section: Introductionmentioning
confidence: 99%