“…At the onset of growth of Mo 2 N, the determining factor for nucle ation is the atomic sequence of the basic TiN lattice by local epitaxy. Thus, during growth of a molybdenum nitride layer, the cubic modification of γ Mo 2 N undergoes stabilization, which, under the action of structural macrostresses upon the achievement of a relatively large thickness, is accompanied by the removal of macrodeformation and the formation of an interface [9,10,15].…”