2005
DOI: 10.1016/j.vacuum.2005.01.033
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Deposition of monoatomic and compound metal layers by the dynamic ion mixing

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Cited by 2 publications
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“…This can be attributed to the two stage pattern of for mation of the phase composition of nanostructured multilayer coatings [9][10][11][13][14][15]. At the onset of growth of Mo 2 N, the determining factor for nucle ation is the atomic sequence of the basic TiN lattice by local epitaxy.…”
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“…This can be attributed to the two stage pattern of for mation of the phase composition of nanostructured multilayer coatings [9][10][11][13][14][15]. At the onset of growth of Mo 2 N, the determining factor for nucle ation is the atomic sequence of the basic TiN lattice by local epitaxy.…”
mentioning
confidence: 99%
“…At the onset of growth of Mo 2 N, the determining factor for nucle ation is the atomic sequence of the basic TiN lattice by local epitaxy. Thus, during growth of a molybdenum nitride layer, the cubic modification of γ Mo 2 N undergoes stabilization, which, under the action of structural macrostresses upon the achievement of a relatively large thickness, is accompanied by the removal of macrodeformation and the formation of an interface [9,10,15].…”
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