Deposition of Highly Oriented Ta<sub>2</sub>O<sub>5</sub>Piezoelectric Thin Films on Silicon for Fabricating Film Bulk Acoustic Resonator Structure by RF Magnetron Sputtering

Kakio, Shoji; Tsuchiya, Akinori; Nakagawa, Yasuhiko

doi:10.7567/jjap.50.07hd09

Cited by 2 publications

(2 citation statements)

References 16 publications

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“…With the exception of T S , these parameters were similar to those in our previous study, [28][29][30] in which X-axis-oriented Ta 2 O 5 piezoelectric thin films were deposited using the same RF magnetron sputtering system. The deposition rate was 0.31-0.41 µm=h.…”

Section: Sample Fabricationsupporting

confidence: 73%

Love-type surface acoustic wave onY–XLiTaO₃with amorphous Ta₂O₅thin film

Kakio

Fukasawa

Hosaka

2015

Jpn. J. Appl. Phys.

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In this study, to obtain a substrate structure with a lower phase velocity, the propagation properties of a Love-type surface acoustic wave (Love SAW) on Y-X LiTaO 3 (LT) with an amorphous tantalum pentoxide (a-Ta 2 O 5 ) thin film were investigated using a simple delay line and a resonator with a wavelength λ of 8 µm. The insertion loss of a simple delay line was decreased markedly by loading with an a-Ta 2 O 5 film owing to a transformation from a leaky SAW (LSAW) to a non-leaky Love SAW. A phase velocity of 3,340 m/s, a coupling factor of 5.8%, and a propagation loss of 0.03 dB/λ were obtained for a normalized thickness h/λ of 0.120. Moreover, the resonance properties of the Love SAW were almost equal or superior to those for an LSAW on Al/36°Y-X LT, except for the fractional bandwidth.

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Section: Sample Fabricationsupporting

confidence: 73%

Love-type surface acoustic wave onY–XLiTaO₃with amorphous Ta₂O₅thin film

Kakio

Fukasawa

Hosaka

2015

Jpn. J. Appl. Phys.

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“…24,25) Moreover, they evaluated the bulk acoustic wave (BAW) properties of a Ta 2 O 5 thin film on a silicon substrate. 26) However, a large propagation loss (PL) for the R-SAW or BAW was observed in the X-axis-oriented Ta 2 O 5 thin films. The large PL is considered to be due to the crystal grain boundaries inside the thin films.…”

Section: Introductionmentioning

confidence: 99%

Evaluation of piezoelectric Ta₂O₅thin films deposited on SrTiO₃substrates

Yu¹,

Kakio²

2017

Jpn. J. Appl. Phys.

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Tantalum pentoxide (Ta2O5) piezoelectric thin films were deposited on (100) and (110) planes of strontium titanate (SrTiO3) substrates using an RF magnetron sputtering system. The crystallinity and Rayleigh-type surface acoustic wave propagation properties of the thin films were evaluated. The possibility that the Ta2O5 thin films were crystallized to orthorhombic Ta2O5 on SrTiO3 substrates by providing a buffer layer deposited without applying O2 radical power was demonstrated. From measured pole figures, it is considered that the crystalline Ta2O5/SrTiO3(100) sample has two lattice arrangements orthogonal to each other, and the crystalline Ta2O5/SrTiO3(110) sample has a single lattice arrangement. For a normalized film thickness h/λ of 0.45, the propagation loss for the deposition on SrTiO3(110) was 0.02 dB/λ, whereas that for the X-axis-oriented Ta2O5 thin film on SiO2 substrate was 0.21 dB/λ. Unfortunately, the coupling factor of the crystalline thin film was less than 0.3% for h/λ ranging from 0.29 to 0.45.

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Deposition of Highly Oriented Ta₂O₅Piezoelectric Thin Films on Silicon for Fabricating Film Bulk Acoustic Resonator Structure by RF Magnetron Sputtering

Cited by 2 publications

References 16 publications

Love-type surface acoustic wave onY–XLiTaO₃with amorphous Ta₂O₅thin film

Love-type surface acoustic wave onY–XLiTaO₃with amorphous Ta₂O₅thin film

Evaluation of piezoelectric Ta₂O₅thin films deposited on SrTiO₃substrates

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Deposition of Highly Oriented Ta2O5Piezoelectric Thin Films on Silicon for Fabricating Film Bulk Acoustic Resonator Structure by RF Magnetron Sputtering

Cited by 2 publications

References 16 publications

Love-type surface acoustic wave onY–XLiTaO3with amorphous Ta2O5thin film

Love-type surface acoustic wave onY–XLiTaO3with amorphous Ta2O5thin film

Evaluation of piezoelectric Ta2O5thin films deposited on SrTiO3substrates

Contact Info

Product

Resources

About

Deposition of Highly Oriented Ta₂O₅Piezoelectric Thin Films on Silicon for Fabricating Film Bulk Acoustic Resonator Structure by RF Magnetron Sputtering

Love-type surface acoustic wave onY–XLiTaO₃with amorphous Ta₂O₅thin film

Love-type surface acoustic wave onY–XLiTaO₃with amorphous Ta₂O₅thin film

Evaluation of piezoelectric Ta₂O₅thin films deposited on SrTiO₃substrates